Micromachines
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2018
·Vol. 9
·期 10
·501
·
IF 2.222
Shuren Song,Da Chen,Hongfei Wang,Chaohui Li,Wei Wang,Wangli Yu,Yanyan Wang,Qiuquan Guo
Measurement of hemostatic parameters is essential for patients receiving long-term oral anticoagulant agents. In this paper, we present a shear mode bulk acoustic resonator based on an inclinedc-axis aluminum nitride (AlN) film for monitoring the human hemostatic parameters. During the blood coagulation process, the resonant frequency of the device decreases along with a step-ladder profile due to the viscosity change during the formation of fibers in blood, revealing the sequential coagulation stages. Two hemostatic parameters with clinical significance, prothrombin time (PT) along with its derived measure of international normalized ratio (INR), are determined from time-frequency curves of the device. Furthermore, the resonator is compared with a commercial coagulometer by monitoring the hemostatic parameters for one month in a patient taking the oral anticoagulant. The results are consistent. In addition, thanks to the excellent potential for integration, miniaturization and the availability of direct digital signals, the proposed device has promising application for point of care coagulation monitoring.Keywords:bulk acoustic wave;AlN film;hemostatic parameters;viscosity sensor
研究领域:
生物医学工程
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临床检验学
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DOI
PubMed
高影响因子
Micromachines
·
2016
·Vol. 7
·期 11
·194
·
IF 1.295
Zhixin Zhang,Zifan Tang,Wenpeng Liu,Hongxiang Zhang,Yao Lu,Yanyan Wang,Wei Pang,Hao Zhang,Xuexin Duan
Controlled drug release has a high priority for the development of modern medicine and biochemistry. To develop a versatile method for controlled release, a miniaturized acoustic gigahertz (GHz) resonator is designed and fabricated which can transfer electric supply to mechanical vibrations. By contacting with liquid, the GHz resonator directly excites streaming flows and induces physical shear stress to tear the multilayered polyelectrolyte (PET) thin films. Due to the ultra-high working frequency, the shear stress is greatly intensified, which results in a controlled disassembling of the PET thin films. This technique is demonstrated as an effective method to trigger and control the drug release. Both theory analysis and controlled release experiments prove the thin film destruction and the drug release.Keywords:controlled drug release;layer-by-layer (LbL);bulk acoustic resonator;MEMS
研究领域:
生物医学工程
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材料科学
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DOI
PubMed
高影响因子
Polymers
·
2024
·Vol. 16
·期 1
·150
·
IF 4.7
Xiangyu He,Jiaqi Lu,Feng Gao,Shurong Dong,Juan Li,Hao Jin,Jikui Luo
Poly(vinylidene fluoride-trifluorethylene) (P(VDF-TrFE)) has promising potential applications in radio-frequency filters due to their excellent piezoelectric properties, flexibility, and stability. In this paper, a flexible film bulk acoustic wave filter is investigated based on P(VDF-TrFE) as piezoelectric film. A new method based on three-step annealing is developed to efficiently remove the porosity inside the P(VDF-TrFE) films so as to improve its properties. The obtained film achieved high β-phase content beyond 80% and a high piezoelectric coefficient of 27.75 pm/V. Based on the low porosity β-phase films, a flexible wide-band RF filter is designed, which consists of a bulk acoustic wave resonator and lumped inductor-capacitor elements as a hybrid configuration. The resonator sets the filter’s center frequency, while the lumped LC-based matching network extends the bandwidth and enhances out-of-band rejection. The testing results of the proposed wide-band filter show its good performance, with 12.5% fractional bandwidth and an insertion loss of 3.1 dB. To verify the possibility of folding and stacking the flexible bulk acoustic wave devices for high-density multi-filter integration in MIMO communication, bending tests of the filter are also conducted with the bending strain range up to 5500 με. The testing results show no noticeable performance degradation after four bending cycles. This work demonstrates the potential of β-phase P(VDF-TrFE) bulk acoustic wave filters to expand the scope of future flexible radio-frequency filter applications.
研究领域:
材料科学
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电子工程
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射频技术
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DOI
PubMed
高影响因子
JOURNAL OF PHYSICS D-APPLIED PHYSICS
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2018
·Vol. 51
·期 5
·055104
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IF 2.373
Wei Wang,Da Chen,Hongfei Wang,Wenhua Yu,Maozeng Wu,Lei Yang
Trace formaldehyde vapor was detected by a micron-scale AlN film bulk acoustic resonator based on mass-sensitive mechanism. The layer-by-layer carbon nanotubes/polyethyleneimine multilayers were assembled on the resonator surface as the sensitive coating. An almost linear decrease of the resonant frequency was observed as a function of the number of nanotubes/polyethyleneimine periods. The multilayers showed a random and porous structure and thus provided a large specific surface area for gas adsorption and diffusion. At the same time, the amine groups in polyethyleneimine had an strong affinity to formaldehyde with excellent selectivity. When exposed to gaseous formaldehyde, the attachment of gas molecules induced a small decrease in the resonant frequency, which made the sensor easily detect formaldehyde at ppb levels with 1 min response time. A linear relationship was observed between the formaldehyde concentrations and the frequency downshift of the resonator. The layer number had an obvious influence on the absorption/desorption behavior of formaldehyde. The gas sensitivity of FBAR sensors was 1.29–1.90 kHz ppb−1 with the limit of detection of 24–38 ppb.
研究领域:
材料科学
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传感器技术
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环境监测
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DOI
高影响因子
ACS Applied Materials & Interfaces
·
2020
·
IF 8.758
Xu Yan,Hemi Qu,Ye Chang,Wei Pang,Yanyan Wang,Xuexin Duan
Gravimetric resonators based on micro/nanoelectromechanical systems (M/NEMS) are potential candidates in developing smaller, less expensive, and higher-performance gas sensors. Metal–organic frameworks (MOFs) with high surface areas have recently come into focus as advanced nanoporous sensitive materials in microgravimetric gas sensors. The surface of MOFs on those sensors is critical in offering water stability and varying absorption behaviors. However, the influences of the surface on sensing performance are less explored and the strategy to tune surface properties of MOFs mounted on gravimetric resonators is still rare. In this paper, a straightforward strategy to engineer surface properties of MOFs, specifically Cu3(benzenetricarboxylate)2 (known as HKUST-1), is reported and the surface hydrophilicity/hydrophobicity of HKUST-1 is tuned by chemical vapor deposition combined with monolayer self-assembly. It was found that the hybrid inorganic and organic surface engineering strategy not only preserves the absorption capacity of inner MOFs but also significantly enhances the sensor’s stability toward water.
研究领域:
材料科学
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传感器技术
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DOI
PubMed
高影响因子
Microsystems & Nanoengineering
·
2024
·Vol. 10
·期 1
·1-10
·
IF 7.3
Wang Zilun,Zhao Zeyu,Jin Suhan,Bian Feilong,Chang Ye,Duan Xuexin,Men Xiangdong,You Rui
Supramolecules are considered as promising materials for volatile organic compounds (VOCs) sensing applications. The proper understanding of the sorption process taking place in host-guest interactions is critical in improving the pattern recognition of supramolecules-based sensing arrays. Here, we report a novel approach to investigate the dynamic host-guest recognition process by employing a bulk acoustic wave (BAW) resonator capable of producing multiple oscillation amplitudes and simultaneously recording multiple responses to VOCs. Self-assembled monolayers (SAMs) of β-cyclodextrin (β-CD) were modified on four BAW sensors to demonstrate the gas-surface interactions regarding oscillation amplitude and SAM length. Based on the method, a virtual sensor array (VSA) type electronic nose (e-nose) can be realized by pattern recognition of multiple responses at different oscillation amplitudes of a single sensor. VOCs analysis was realized respectively by using principal component analysis (PCA) for individual VOC identification and linear discriminant analysis (LDA) for VOCs mixtures classification.
研究领域:
化学
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材料科学
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传感技术
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DOI
PubMed
高影响因子
ACS Applied Materials & Interfaces
·
2014
·
IF 5.9
Wenpeng Liu,Jingwei Wang,Yifei Yu,Ye Chang,Ning Tang,Hemi Qu,Yanyan Wang,Wei Pang,Hao Zhang,Daihua Zhang,Huaping Xu,Xuexin Duan
In this work, a new method to tune the resonant frequency of microfabricated resonator using molecular layer-by-layer (LbL) self-assembly approach is demonstrated. By simply controlling the polymer concentration and the number of layers deposited, precisely tuning the frequency of microfabricated resonators is realized. Due to its selective deposition through specific molecular recognitions, such technique avoids the high-cost and complex steps of conventional semiconductor fabrications and is able to tune individual diced device. Briefly, film bulk acoustic resonator (FBAR) is used to demonstrate the tuning process and two types of LbL deposition methods are compared. The film thickness and morphology have been characterized by UV–vis reflection spectra, ellipsometer and AFM. As a result, the maximum resonant frequency shift of FBAR reaches more than 20 MHz, meaning 1.4% tunability at least. The minimum frequency shift is nearly 10 kHZ per bilayer, indicating 7 ppm tuning resolution. Pressure cooker test (PCT) is performed to evaluate the reliability of LbL coated FBAR. Furthermore, applications for wireless broadband communication and chemical sensors of LbL coated FBAR have been demonstrated.
研究领域:
微机电系统
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材料科学
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传感器技术
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DOI
PubMed
高影响因子
SENSORS AND ACTUATORS B-CHEMICAL
·
2017
·
IF 5.401
Yuan Zhao,Qingrui Yang,Ye Chang,Hemi Qu,Wei Pang,Hao Zhang,Xuexin Duan
This paper describes the detection of volatile organic compounds (VOCs) using an e-nose system based on a virtual sensor array (VSA). The VSA was realized by seven different resonant modes of a single piezotransduced silicon bulk acoustic wave resonator (PSBAR) which can greatly reduce the complexity of a conventional e-nose system. The PSBAR was designed and fabricated using standard CMOS compatible process. The resonant modes of the PSBAR and its capability of VOCs discrimination were theoretically explored through finite element analysis. The discrimination effect was enhanced by the non-uniform adsorption of gas molecules on the top, side and bottom regions of the resonator. Score plots and radar fingerprints obtained respectively from principal component analysis (PCA) and fitted coefficient of adsorption isotherms for each VOC compose sufficient information to successfully discriminate different VOCs. The proposed novel VSA shows great potential as a compact and promising e-nose system.
研究领域:
传感器技术
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材料科学
·
化学检测
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产品关联
DOI
高影响因子
Nanoscale Research Letters
·
2016
·Vol. 11
·期 1
·1-8
·
IF 2.584
Zheng Dan,Guo Peng,Xiong Juan,Wang Shengfu
A ZnO-based film bulk acoustic resonator has been fabricated using a magnetron sputtering technology, which was employed as a biosensor for detection of mucin 1. The resonant frequency of the thin-film bulk acoustic resonator was located near at 1503.3 MHz. The average electromechanical coupling factor \( {K}_{\mathrm{eff}}^2 \) and quality factor Q were 2.39 % and 224, respectively. Using the specific binding system of avidin-biotin, the streptavidin was self-assembled on the top gold electrode as the sensitive layer to indirectly test the MUC1 molecules. The resonant frequency of the biosensor decreases in response to the mass loading in range of 20–500 nM. The sensor modified with the streptavidin exhibits a high sensitivity of 4642.6 Hz/nM and a good selectivity.
研究领域:
生物医学工程
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材料科学
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癌症诊断
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产品关联
DOI
PubMed
高影响因子
Micromachines
·
2017
·Vol. 8
·期 4
·116
·
IF 1.833
Wenpeng Liu,Hemi Qu,Jizhou Hu,Wei Pang,Hao Zhang,Xuexin Duan
We developed a highly sensitive humidity sensor based on the combination of ultrahigh-frequency film bulk acoustic resonator (FBAR) and nano-assembled polyelectrolyte (PET) thin films. The water molecule absorption efficiency was optimized by forming loosely-packed PET nanostructures. Then, the humidity sensing characteristics were analyzed in terms of sensitivity, linearity, reversibility, stability and detection limit. As a result, PET-coated FBAR exhibits excellent humidity sensitivity of 2202.20 Hz/ppm, which is five orders of magnitude higher than quartz crystal microbalance (QCM). Additionally, temperature dependence was investigated with the result that PET-coated FBAR possessed a higher sensitivity at low temperature. Furthermore, we realized the selective detection of water vapor from volatile organic compounds (VOCs) with respect to the polarity property. Owing to the high sensitivity, miniaturized size and ultrahigh operating frequency, PET-coated FBAR is uniquely favorable as a wireless humidity sensor node to integrate into wireless sensor networks (WSNs).Keywords:humidity sensor;film bulk acoustic resonator (FBAR);ultrahigh frequency;microelectromechanical resonator;nano-assembled polyelectrolyte (PET) thin films;wireless sensor networks (WSNs)
研究领域:
传感器技术
·
材料科学
·
微机电系统
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DOI
高影响因子
RSC Advances
·
2015
·Vol. 5
·期 81
·66355-66359
·
IF 3.84
Peng Guo,Juan Xiong,Dan Zheng,Weihai Zhang,Lei Liu,Shengfu Wang,Haoshuang Gu
AlN thin film bulk acoustic resonators (FBARs) with a resonant frequency of ∼575 MHz have been fabricated to function as an epithelial tumor marker mucin 1 (MUC1) biosensor. Streptavidin was assembled on the sensitive area of FBAR. After the recognition between aptamers–AuNP conjugates and MUC1, biotin, along with the conjugates, was captured by streptavidin onto the surface of FBARs. Therefore, the target MUC1 could be sensitively detected. This biosensor exhibited a good linear relationship between the frequency shifts and the concentrations of MUC1 ranging from 30 to 500 nM, which indicated the sensitivity is about 818.6 Hz nM−1. The frequency shift remained relatively stable when the concentration of MUC1 was greater than 500 nM since the binding between MUC1 and aptamers–AuNP conjugates reached saturation. The selectivity experiment demonstrated that this biosensor can precisely detect MUC1 with good specificity. The positive results suggest that FBAR is an attractive alternative to a new approach for the detection of MUC1.
研究领域:
生物医学工程
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癌症诊断
·
纳米技术
·
生物化学
✓ 已验证
DOI
高影响因子
BIOSENSORS & BIOELECTRONICS
·
2015
·
IF 6.409
Menglun Zhang,Jingze Huang,Weiwei Cui,Wei Pang,Hao Zhang,Daihua Zhang,Xuexin Duan
Micro/nano scale biosensors integrated with the local adsorption mask have been demonstrated to have a better limit of detection ( LOD ) and less sample consumptions. However, the molecular diffusions and binding kinetics in such confined droplet have been less studied which limited further development and application of the local adsorption method and imposed restrictions on discovery of new signal amplification strategies. In this work, we studied the kinetic issues via experimental investigations and theoretical analysis on microfabricated biosensors. Mass sensitive film bulk acoustic resonator (FBAR) sensors with hydrophobic Teflon film covering the non-sensing area as the mask were introduced. The fabricated masking sensors were characterized with physical adsorption of bovine serum albumin (BSA) and specific binding of antibody and antigen. Over an order of magnitude improvement on LOD was experimentally monitored. An analytical model was introduced to discuss the target molecule diffusion and binding kinetics in droplet environment, especially the crucial effects of incubation time, which has been less covered in previous local adsorption related literatures. An incubation time accumulated signal amplification effect was theoretically predicted, experimentally monitored and carefully explained. In addition, device optimization was explored based on the analytical model to fully utilize the merits of local adsorption. The discussions on the kinetic issues are believed to have wide implications for other types of micro/nano fabricated biosensors with potentially improved LOD .
研究领域:
生物传感器
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分析化学
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纳米技术
·
生物物理
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DOI
PubMed
高影响因子
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