OPTICS EXPRESS
·
2023
·Vol. 31
·期 22
·36037-36047
·
IF 3.8
Dexing Zhu,Jian Zhang,Qiao Xu,Yaguo Li
Three-dimensional printing enables the fabrication of silica glass optics with complex structures. However, shrinkage remains a significant obstacle to high-precision 3D printing of glass optics. Here we 3D-printed Dammann gratings (DGs) with low lateral shrinkage (<4%) using a two-photon polymerization (2PP) technique. The process consists of two steps: patterning two-photon polymerizable glass slurry with a 515 nm femtosecond laser to form desired structures and debinding/sintering the structures into transparent and dense silica glass. The sintered structures exhibited distinct shrinkage rates in the lateral against longitudinal directions. As the aspect ratio of the structures increased, the lateral shrinkage decreased, while the longitudinal shrinkage increased. Specifically, the structure with an aspect ratio of approximately 60 achieved a minimal lateral shrinkage of 1.1%, the corresponding longitudinal shrinkage was 61.7%. The printed DGs with a surface roughness below 20 nm demonstrated good beam-shaping performance. The presented technique opens up possibilities for rapid prototyping of silica diffractive optical elements.
研究领域:
光学
·
材料科学
·
制造技术
✓ 已验证
产品关联
DOI
PubMed
高影响因子
Micromachines
·
2023
·Vol. 14
·期 4
·846
·
IF 3.4
Yuyu Zhang,Yu Wu,Quanquan Sun,Lifeng Shen,Jie Lan,Lingxi Guo,Zhenfeng Shen,Xuefang Wang,Junfeng Xiao,Jianfeng Xu
Micro-optical gyroscopes (MOGs) place a range of components of the fiber-optic gyroscope (FOG) onto a silicon substrate, enabling miniaturization, low cost, and batch processing. MOGs require high-precision waveguide trenches fabricated on silicon instead of the ultra-long interference ring of conventional F OGs. In our study, the Bosch process, pseudo-Bosch process, and cryogenic etching process were investigated to fabricate silicon deep trenches with vertical and smooth sidewalls. Different process parameters and mask layer materials were explored for their effect on etching. The effect of charges in the Al mask layer was found to cause undercut below the mask, which can be suppressed by selecting proper mask materials such as SiO2. Finally, ultra-long spiral trenches with a depth of 18.1 μm, a verticality of 89.23°, and an average roughness of trench sidewalls less than 3 nm were obtained using a cryogenic process at −100 °C.
研究领域:
微纳米制造
·
光学工程
✓ 已验证
产品关联
DOI
PubMed
高影响因子
Advanced Science
·
2021
·Vol. 8
·期 8
·2003941
·
IF 16.806
Xian Sun,Xiaochuan Zhang,Xiaohong Ren,Hongyu Sun,Li Wu,Caifen Wang,Xiaohui Ye,Peter York,Zhaobing Gao,Hualiang Jiang,Jiwen Zhang,Xianzhen Yin
The effective pulmonary deposition of inhaled particulate carriers loaded with drugs is a prerequisite for therapeutic effects of drug delivery via inhalation route. Revealing the sophisticated lung scaffold and intrapulmonary distribution of particles at three-dimensional (3D), in-situ, and single-particle level remains a fundamental and critical challenge for dry powder inhalation in pre-clinical research. Here, taking advantage of the micro optical sectioning tomography system, the high-precision cross-scale visualization of entire lung anatomy is obtained. Then, co-localized lung-wide datasets of both cyto-architectures and fluorescent particles are collected at full scale with the resolution down to individual particles. The precise spatial distribution pattern reveals the region-specific distribution and structure-associated deposition of the inhalable particles in lungs, which is undetected by previous methods. Overall, this research delivers comprehensive and high-resolution 3D detection of pulmonary drug delivery vectors and provides a novel strategy to evaluate materials distribution for drug delivery.
研究领域:
药剂学
·
生物医学工程
·
肺科学
✓ 已验证
产品关联
DOI
PubMed
高影响因子
ACS Applied Materials & Interfaces
·
2021
·
IF 9.229
Duan Chen,Hao Tan,Tianyi Xu,Wei Wang,Hezhang Chen,Jie Zhang
Micro–nanofabrication of conductive polymers (CPs) with functional structures is in great demand in organic electronic devices, micro-optics, and flex sensors. Here, we report the fabrication of micropatterned poly(3,4-ethylenedioxythiophene) (PEDOT) and its applications on flexible electrochromic devices and tunable diffractive optics. The localized electropolymerization of 3,4-ethylenedioxythiophene at the electrode/agarose gel stamping interface through an electrochemical wet stamping (E-WETS) technique is used to fabricate PEDOT with functional microstructures. PEDOT microdots, micro-rectangles, and interdigitated array microelectrodes are fabricated with submicron tolerance and ∼2 μm smallest feature size. Furthermore, the flexible PEDOT electrochromic devices consisting of the logo of Xiamen University are fabricated with a reversible switch of absorptivity. The improved optical and coloration–amperometric responses of electrochromism are demonstrated because of the enhanced charge transport rate of the micropatterned PEDOT. The electrochromism of the 2D PEDOT micropatterns is further used as a binary diffractive optical element to modulate the intensity and efficiency of diffracted 2D structural light because of the switchable absorptivity during doping and dedoping processes. When the potential is switched from 1 to −1 V to tune the absorptivity at ∼600 nm from low to high, the intensity of zero-order diffraction light spot decreases with the intensity of other order diffraction light spots increasing dramatically. The results demonstrate that E-WETS provides an alternative method for the fabrication of CPs with functional micro–nanostructures. The electrochemical tunable diffraction with high reversibility and fast response is of potential applications in micro-optics and flex sensors.
研究领域:
有机电子学
·
微光学
·
传感器技术
✓ 已验证
DOI
高影响因子
OPTICAL ENGINEERING
·
2020
·
IF 1.113
Miao Xu,Zi Wang,Hongbo Lu,Longzhen Qiu
A facial method was used to enhance the dynamic response of polyvinyl chloride (PVC) gel tunable lenticular microlens array (LMA). The response time could be reduced using a discontinuous hydrophobic layer-modified electrode substrate due to a decrease in friction between the substrate surface and PVC gel. The application of DC voltage (V = − 45 V) to LMA induced a response time <240 ms. The proposed PVC gel LMA looks promising for use in image processing and two/three-dimensional switchable displays due to its fast-dynamic response, good stability, compact structure, and easy fabrication.
研究领域:
光学工程
·
智能材料
·
显示技术
·
微光学
✓ 已验证
DOI
高影响因子
危险品化学品经营许可证（带存储）