RUSSIAN JOURNAL OF ELECTROCHEMISTRY
·
2012
·Vol. 48
·期 11
·1135-1139
·
IF 0.534
Sun Xuping,Liao Fang,Lu Wenbo,Chang Guohui
In this paper, electrodeposition technique, in combination with well-established microfabrication techniques, is used for the first time herein to the controllable fabrication of novel Pd nanotextured micro-electrodes (NTMEs). This NTMES system is proven to be particularly powerful and versatile with two degrees of freedom: nanoscale control of electrode nanotexturing and the microscale control of the electrode size and shape.
研究领域:
生物医学工程
·
纳米医学
·
电化学传感
·
微系统技术
·
分子诊断
✓ 已验证
DOI
高影响因子
Small
·
2023
·Vol. 19
·期 24
·2207362
·
IF 13.3
Yaqiang Ji,Yuan Zhang,Jiaqi Zhu,Pai Geng,Jonathan E. Halpert,Liang Guo
Flexible pressure sensors play an indispensable role in flexible electronics. Microstructures on flexible electrodes have been proven to be effective in improving the sensitivity of pressure sensors. However, it remains a challenge to develop such microstructured flexible electrodes in a convenient way. Inspired by splashed particles from laser processing, herein, a method for customizing microstructured flexible electrodes by femtosecond laser-activated metal deposition is proposed. It takes advantage of the catalyzing particles scattered during femtosecond laser ablation and is particularly suitable for moldless, maskless, and low-cost fabrication of microstructured metal layers on polydimethylsiloxane (PDMS). Robust bonding at the PDMS/Cu interface is evidenced by the scotch tape test and the duration test over 10 000 bending cycles. Benefiting from the firm interface, the developed flexible capacitive pressure sensor with microstructured electrodes presents several conspicuous features, including a sensitivity (0.22 kPa −1 ) 73 times higher than the one using flat Cu electrodes, ultralow detection limit (<1 Pa), rapid response/recovery time (4.2/5.3 ms), and excellent stability. Moreover, the proposed method, inheriting the merits of laser direct writing, is capable of fabricating a pressure sensor array in a maskless manner for spatial pressure mapping.
研究领域:
生物医学工程
·
柔性电子学
·
微纳加工
·
传感器技术
·
材料科学
✓ 已验证
DOI
高影响因子
Small
·
2019
·Vol. 15
·期 44
·1902819
·
IF 10.856
Xiaojun Ruan,Jiangjiang Luo,Rui Wang,Yanbo Yao,Jingjiao Guan,Tao Liu
A nanometer-thick carbon film with a highly ordered pattern structure is very useful in a variety of applications. However, its large-scale, high-throughput, and low-cost fabrication is still a great challenge. Herein, microcontact printing (µCP) and direct laser writing carbonization (DLWc) are combined to develop a novel method that enables ease of fabrication of nanometer-thick and regularly patterned carbon disk arrays (CDAs) and holey carbon films (HCFs) from a pyromellitic dianhydride-oxydianiline-based polyamic acid (PAA) solution. The effect of PAA concentration and pillar lattice structure of the polydimethyl siloxane stamp are systematically studied for their influence on the geometrical parameter, surface morphology, and chemical structure of the finally achieved CDAs and HCFs. Within the PAA concentration being investigated, the averaged thickness of CDAs and HCFs can be tailored in a range from a few tens to a few hundred of nanometers. The µCP+DLWc-enabled electrically conductive CDAs and HCFs possess the characteristics of ease-of-fabrication, nanometer-thickness, highly regular and controlled patterns and structures, and the ability to form on both hard and soft substrates, which imparts usefulness in electronics, photonics, energy storage, catalysis, tissue engineering, as well as physical, chemical, and bio-sensing applications.
研究领域:
材料科学
·
纳米科技
·
生物医学工程
·
表面化学
·
微纳加工
✓ 已验证
DOI
高影响因子
CHEMICAL RESEARCH IN CHINESE UNIVERSITIES
·
2015
·Vol. 31
·期 4
·585-589
·
IF 0.875
Wei Qi,Wang Liyuan
Molecular glass resist has been considered as one of the best choices for a new generation of lithography. In this work, a new type of photoactive compound was obtained by the esterification of tannic acid with 2-diazo-1-naphthoquinone-4-sulfonyl chloride(2,1,4-DNQ-Cl) and ditertbutyl dicarbonate. The new obtained compound possessed both a photosensitive group of diazonaphthoquinone sulfonate(2,1,4-DNQ) and a group of acidolytic protection. Upon the irradiation of the compound under 365 nm light, the former group was photolyzed and converted into indene carboxylic acid along with a small amount of sulfonic acid, which could lead to the deprotection of the latter group. As a result, a novel i-line molecular glass photoresist was formed with the chemical modification of tannic acid. The experimental results show that the modificated compound had a fair solubility in many organic solvents. The lithographic performance of the resist was evaluated on an i-line exposure system with high photosensitivity and resolution as well.
研究领域:
材料科学
·
微纳加工
·
高分子化学
·
光电子学
·
半导体工艺
✓ 已验证
DOI
高影响因子
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
·
2024
·Vol. 221
·期 16
·2400342
·
IF 1.9
Jian Cheng,Xin Liu,Weichang Kong,Qingzheng Lei,Zhiyu Yu,Dun Liu
The fabrication of flexible electronics has gained extensive attention due to the growing demand of flexible devices. Among various methods, laser direct writing technology has emerged as a promising approach due to its advantages of high processing accuracy and simplicity. This research focuses on the preparation of copper microelectrodes using laser-induced reduction of CuO nanoparticles (Cu NPs) on polyethylene terephthalate films. First, the influence of various parameters on the conductivity of the copper microelectrodes is investigated. Second, flexible copper microelectrodes with a minimum resistivity of 62.29 μΩ cm and an adhesion grade of 4B level are successfully fabricated. Building upon these results, a capacitive pressure sensor is developed with optimal sensitivity of 3.99 Pa −1 , good hysteresis of 3.99%, and response and recovery times of 1.2 and 1.3 s, respectively. Repeatability tests confirm the sensor's stability and fatigue resistance. This research provides valuable insights for the production of flexible sensors.
研究领域:
生物医学工程
·
柔性电子学
·
传感器技术
·
纳米材料
·
微纳加工
·
可穿戴设备
✓ 已验证
DOI
高影响因子
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
·
2014
·
IF 1.403
Kun Shan,Ping Zhou,Jiqing Cai,Renke Kang,Kang Shi,Dongming Guo
Stress free polishing method is preferred for a damage free surface of copper with ultra-flatness and ultra-smoothness. Such a surface offers a perfect substrate for integrated circuits and micro-electromechanical systems fabrication. A new polishing method, called electrogenerated chemical polishing (EGCP), is proposed based on the principle of the scanning electrochemical microscope (SECM) and the diffusion controlled chemical reaction. Roughness of a Cu surface is reduced from 100.5 nm to 3.6 nm by the proposed method. To demonstrate the planarization capability of this new method, a patterned Cu surface with an array of micro-columns is planarized with a peak-valley (PV) value from 4.7 μm to 0.059 μm.
研究领域:
材料科学
·
表面工程
·
微纳加工
·
半导体制造
·
电化学
✓ 已验证
DOI
高影响因子
危险品化学品经营许可证（带存储）