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JOURNAL OF NON-CRYSTALLINE SOLIDS · 2025 · IF 3.5

Fabrication of fused silica microlens arrays by gel casting and modulation of focal length by controlling gel solid content

Haikuan Chen,Xiaoyan Sun,Zhouwei He,Dejian Kong,Qinglong Zhang,Youwang Hu,Ji'an Duan

This article presents a method for fabricating fused silica quasi-periodic microlens array (MLA) by gel casting and template transfer. While keeping slurry viscosity consistent, by precisely controlling polyvinyl alcohol (PVA) content to adjust solid content, which can alter sintering shrinkage and regulates microlens focal length. This study determined an appropriate viscosity threshold of 300 mPa·s. The green body can be transformed into a fused silica MLA by sintering in a vacuum atmosphere at 1300 °C for 30 min. Additionally, this study established a quantitative relationship between the PVA content and the characteristic dimensions of the microlens. After measuring the prepared multifocal microlens array (MF-MLA), it was found that by adjusting the PVA content, the focal length can vary in the range of −320.03 μm to −37.14 μm and −110.56 μm to −25.29 μm. This approach provides an efficient, adaptable, and environmentally friendly way for the production of fused silica micro-optical components.

CAS / MDL: 9002-89-5
研究领域: 光学工程 · 材料科学
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Advanced Optical Materials · 2019 ·Vol. 8 ·期 4 ·1901767 · IF 7.125

IR Artificial Compound Eye

Feng Liu,Hao Bian,Fan Zhang,Qing Yang,Chao Shan,Minjing Li,Xun Hou,Feng Chen

In this work, a 3D IR artificial compound eye (ACE) optical component is fabricated using thermoplastic IR polymer material. The femtosecond laser-assisted wet etching and the 3D nano-imprinting techniques are proposed for fabricating this thin shell multi-aperture component. The prepared component is close-packed with over 1000 high-quality micro-facet-lenslets (ommatidia) on the semispherical thin shell dome with base radius of 2.7 mm and sag height of 2.1 mm, enabling enlarged field of view to 148°. The ommatidia with diameter of 150 µm and numerical aperture of 0.35 are demonstrated to have a practical spatial resolution up to 160 lp mm −1 . IR imaging experiments (both in passive and active scenarios) confirm its outstanding optical properties and uniformity, and demonstrate the probability of thermal target imaging with such component in the near-infrared band. The proposed fabrication strategy shows remarkable efficiency and advantage in massive replication, and such ACE component predicts its potential in emerging applications, such as IR imaging, target tracking, and so on.

研究领域: 光学工程 · 材料科学 · 成像技术
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ACS Applied Materials & Interfaces · 2019 · IF 8.456

Fabrication of Hierarchical Micro/Nano Compound Eyes

Wenjun Wang,Jiang Li,Rongheng Li,Benqiang Li,Xuesong Mei,Xuefeng Sun

Fabrication of a hierarchical macro-/micro-/nano compound eye is presented in this paper. This bioinspired compound (BIC) eye is obtained by an integrated manufacturing technology that combines (i) nanoimprinting, (ii) picosecond laser swelling, and (iii) air-assisted deformation. The diameter and height of nanopillars, microlens, and macrobase can be controlled precisely by fine-tuning the process parameters. The multifunctional properties of the BIC eye, such as superhydrophobicity, antireflection, and other optical characteristics, are investigated. It is found that the microlens with nanopillars can effectively improve the surface wettability with a contact angle of 152° and contact angle hysteresis of 12°, and enhance transmittance by 2% over the wavelength range of 200–1200 nm. Moreover, the final hierarchical compound eye exhibits the excellent imaging properties and a wide field-of-view of 120° without distortion. These multifunctional properties will enable the widespread application of the compound eye in diverse real-time environmental conditions.

CAS / MDL: 493-52-7 9011-14-7
研究领域: 材料科学 · 光学工程 · 生物仿生学
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Micromachines · 2024 ·Vol. 15 ·期 4 ·460 · IF 3

Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching

Yu Wu,Xianshan Dong,Xuefang Wang,Junfeng Xiao,Quanquan Sun,Lifeng Shen,Jie Lan,Zhenfeng Shen,Jianfeng Xu,Yuqingyun Du

In this paper, we proposed an efficient and high-precision process for fabricating large-area microlens arrays using thermal reflow combined with ICP etching. When the temperature rises above the glass transition temperature, the polymer cylinder will reflow into a smooth hemisphere due to the surface tension effect. The dimensional differences generated after reflow can be corrected using etching selectivity in the following ICP etching process, which transfers the microstructure on the photoresist to the substrate. The volume variation before and after reflow, as well as the effect of etching selectivity using process parameters, such as RF power and gas flow, were explored. Due to the surface tension effect and the simultaneous molding of all microlens units, machining a 3.84 × 3.84 mm2silicon microlens array required only 3 min of reflow and 15 min of ICP etching with an extremely low average surface roughness Sa of 1.2 nm.

研究领域: 微纳米技术 · 光学工程 · 材料科学
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ANALYTICAL CHEMISTRY · 2022 · IF 8.008

Tunable and Dynamic Optofluidic Microlens Arrays Based on Droplets

Li Liang,Xuejia Hu,Yang Shi,Shukun Zhao,Qinghao Hu,Minhui Liang,Ye Ai

Microlens arrays (MLAs) are acquiring a key role in the micro-optical system, which have been widely applied in the fields of imaging processing, light extraction, biochemical sensing, and display technology. Compared with solid MLAs, liquid MLAs have received extensive attention due to their natural smooth interface and adjustability. However, manufacturing tunable liquid MLAs with ideal structures is still a key challenge for current technologies. In this paper, a novel and simple optofluidic method is demonstrated, enabling the tunable focusing and high-quality imaging of liquid MLAs. Tunable droplets are fabricated and self-assembled into arrays as the MLAs, which can be easily adjusted to focus, form images, and display different focal lengths. Tuning of MLAs’ focusing properties (range from 550 to 5370 μm) is demonstrated by changing the refractive index (RI) of the droplets with a fixed size of 200 μm, which can be changed by adjusting the flow rates of the two branch streams. Also, the corresponding numerical apertures of the MLAs range from 0.026 to 0.26. Furthermore, the MLAs’ functionality for microparticle imaging applications is also illustrated. Combining the MLAs with a 4× objective, microparticle imaging is magnified two times, and the resolution has also been improved on the original basis. Besides, both the size and RI of the MLAs in an optofluidic chip can be further adjusted to detect samples at different positions. These MLAs have the merits of high optical performance, a simple fabrication procedure, easy integration, and good tunability. Thus, it shows promising opportunities for many applications, such as adaptive imaging and sensing.

研究领域: 光学 · 微流控技术 · 成像技术 · 生物传感
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OPTICS AND LASERS IN ENGINEERING · 2019 · IF 4.059

Rapid fabrication of microlens arrays on PMMA substrate using a microlens array by rear-side picosecond laser swelling

Jiang Li,Wenjun Wang,Xuesong Mei,Aifei Pan,Bin Liu,Jianlei Cui

Microlens arrays were fabricated on polymethyl methacrylate (PMMA) substrate using a microlens array (MLA) with rear-side ps laser swelling in this study. The modified beam energy can ensure the fabricated microlenses are uniform. Using the foci of a microlens array (MLA), approximately 630 microlenses were fabricated with a single series of pulses, which provides greater processing throughput compared to point-to-point direct laser writing . The formation of smooth microlenses is attributed to photolysis of methyl red (MR) and molecular relaxation . The dependence of height and diameter of the microlenses on laser fluence and irradiation time were investigated. The results show that the size of microlenses could be controlled using the appropriate fluence and irradiation time. Finally, an array of mirolenses with high uniformity was fabricated over a large area. The diameter and height of the microlenses were measured to be 55 and 12 µm, respectively.

CAS / MDL: 9011-14-7
研究领域: 光学制造 · 材料科学
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ORGANIC ELECTRONICS · 2022 · IF 3.868

Achieving high performance InP quantum dot light-emitting devices by using inkjet printing

Jieyu Bai,Hailong Hu,Yongshen Yu,Yangbin Zhu,Zhongwei Xu,Wenchen Zheng,Haobing Zhao,Kaiyu Yang,Lihua Lin,Tailiang Guo,Fushan Li

InP quantum dots (QDs) are considered to be one of the most promising materials for application in light-emitting devices due to the advantages of heavy-metal-free characteristic and widely tunable spectrum covering most of the visible and near-infrared regions. However, the performance of InP quantum dot light-emitting diodes (QLEDs) lags far behind their Cd-containing counterparts, especially as the InP pixelated device is still in its infancy. In this study, multi-component functional QD inks with excellent stability and printability was developed for inkjet printing InP array QLEDs. High-quality QD films can be obtained, both on flat and bank-containing substrates, by precisely controlling the competition between capillary and Marangoni flows in the printed droplets, enabling high device performance. In addition, a periodic ZnO microlens arrays was prepared by nanoimprinting technology to enhance the light extraction efficiency of inkjet-printed InP QLEDs, leading to 127.6% improvement in external quantum efficiency (EQE) compared to the control device. The maximum luminance, EQE and current efficiency of the obtained device are 17,759 cd/m 2 , 8.1% and 11.1 cd/A, respectively. These results may facilitate the applications of high performance environment-friendly QLEDs by inkjet printing technology.

研究领域: 材料科学 · 光电子学 · 纳米技术
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Laser & Photonics Reviews · 2024 · IF 9.8

3D Nanolithography via Holographic Multi-Focus Metalens

Xinger Wang,Xuhao Fan,Yuncheng Liu,Ke Xu,Yining Zhou,Zexu Zhang,Fayu Chen,Xuan Yu,Leimin Deng,Hui Gao,Wei Xiong

3D nanolithography based on two-photon polymerization (TPP) allows for the high-precision fabrication of nearly arbitrary 3D micro/nanostructures, finding extensive applications in areas such as micro-optics, micro-mechanics, and biomedicine. However, the large size, complexity of optical systems, and high costs have significantly constrained the widespread adoption of 3D nanolithography technology in both scientific research and industry. In this study, a metasurface is introduced, for the first time, into 3D nanolithography resulting in the construction of a miniaturized and simplified TPP system that achieved efficient multi-focus parallel processing with high uniformity. A microlens array is fabricated, showcasing the system's application capacity to generate an array of devices with high consistency and quality. It is believed that the utilization of metasurface devices will provide a novel TPP operating platform, enabling richer and more flexible printing functionalities while maintaining system miniaturization and low cost.

研究领域: 微纳制造 · 光学工程 · 生物医学工程
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Light-Science & Applications · 2023 ·Vol. 12 ·期 1 ·1-9 · IF 19.4

Mold-free self-assembled scalable microlens arrays with ultrasmooth surface and record-high resolution

Liu Zhihao,Hu Guangwei,Ye Huapeng,Wei Miaoyang,Guo Zhenghao,Chen Kexu,Liu Chen,Tang Biao,Zhou Guofu

Microlens arrays (MLAs) based on the selective wetting have opened new avenues for developing compact and miniaturized imaging and display techniques with ultrahigh resolution beyond the traditional bulky and volumetric optics. However, the selective wetting lenses explored so far have been constrained by the lack of precisely defined pattern for highly controllable wettability contrast, thus limiting the available droplet curvature and numerical aperture, which is a major challenge towards the practical high-performance MLAs. Here we report a mold-free and self-assembly approach of mass-production of scalable MLAs, which can also have ultrasmooth surface, ultrahigh resolution, and the large tuning range of the curvatures. The selective surface modification based on tunable oxygen plasma can facilitate the precise pattern with adjusted chemical contrast, thus creating large-scale microdroplets array with controlled curvature. The numerical aperture of the MLAs can be up to 0.26 and precisely tuned by adjusting the modification intensity or the droplet dose. The fabricated MLAs have high-quality surface with subnanometer roughness and allow for record-high resolution imaging up to equivalently 10,328 ppi, as we demonstrated. This study shows a cost-effective roadmap for mass-production of high-performance MLAs, which may find applications in the rapid proliferating integral imaging industry and high-resolution display.

研究领域: 光学工程 · 微纳加工 · 表面科学 · 材料科学 · 成像技术
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OPTICS AND LASER TECHNOLOGY · 2021 · IF 3.867

Self-assembled photocurable polymer biconvex microlens array based on double-faced discontinuous hydrophobic surface

Yingying Xue,Senhao Li,Miao Xu,Zhenbin Li,Hongbo Lu

Biconvex microlens arrays (MLAs) are key parts in optical systems. In this work, a facile method was developed for the fabrication of biconvex MLAs on ultrathin glass substrates, in which both sides were modified with microholes patterned hydrophobic layers. The difference of the hydrophobicity inside and outside the microholes pattern were very large. The photocurable polymer formed droplets array on the discontinuous hydrophobic layer self-assembly, and polymeric biconvex MLAs were obtained after UV curing. Each polymeric dome formed on front and back sides was concentric and preserved the same size. The as-obtained biconvex MLAs showed an average diameter of 297 μm, a focal length of 669 μm, a numerical aperture (NA) of 0.21, and a maximum resolution of 45.3 lp/mm. Compared to plano-convex MLAs using the same materials with the same size, which exhibits the maximum resolution of 16 lp/mm, the biconvex MLAs displayed highly improved optical resolution. In sum, the advantages of the proposed method in terms of simple fabrication, good optical performances and high consistency in large areas make it promising for use in 3D displays, image processing, fiber coupling, optical data storage, light extraction, and biomedical processing.

研究领域: 光学材料 · 微纳制造 · 光电子器件
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JOURNAL OF CRYSTAL GROWTH · 2018 · IF 1.742

Fabrication of large scale PS monolayer colloidal crystal film by using a novel secondary self-assembly method for nanoimprint technique

Xuehua Zhang,Liang Yu,Wei Zhang,Fangren Hu,Yongjin Wang

PS microspheres emulsions with different PS diameters of 207 and 378 nm were prepared by using an emulsifier-free polymerization method. A novel secondary self-assembly method which combined the spin coating and the lifting-up method was used to prepare the close-packed PS MCC films. During the process, the PS MCC film was firstly assembled on a glass substrate by a spin coating technique. Secondly, the obtained PS MCC film was transferred on the air-water interface by immersing the PS glass substrate in water using a dip-coater. Thirdly, the floating close-packed PS MCC films on the air-water interface was transferred to a new glass substrate by using a lifting-up method. During the spin-coating and the self-assembly process, some SDS solution was added in the PS films to improve the uniformity of the PS layer. Effects of the spin-coating speeds, the SDS solution concentration and the lifting-up rates on the morphology of PS MCC films have been discussed. Scanning electron microscopy was used to observe the morphological properties of the PS colloidal crystal films. Results indicate that a relatively close-packed and large scale PS MCC films can be obtained when the spinning speed is 2000 rpm for 60 s, the SDS solution concentration is 2 wt% and the lifting-up rate is 2 mm/min. Furthermore, the polydimethylsiloxane soft mold was replicated from the-fabricated PS MCC films and was then imprinted onto the photosensitive hybrid film under UV-irradiation and thus the micro-lens arrays built in the photosensitive hybrid sol–gel film were obtained.

研究领域: 材料科学 · 纳米技术
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Nano Research · 2023 ·Vol. 16 ·期 7 ·10156-10163 · IF 9.9

Approaching the theoretical efficiency limit of quantum-dot light-emitting diodes via synergistic optimization

Li Haotao,Tian Fengshou,Chen Shuming

The importance of optical resonance in enhancing light outcoupling efficiency (OCE) is frequently overlooked in conventional bottom-emitting quantum-dot light-emitting diodes (QLEDs) due to their weak microcavity effect. Herein, we show that by synergistically optimizing the optical and the electrical performances, QLEDs with efficiency approaching the theoretical limit can be realized. By introducing a high refractive index indium zinc oxide (IZO) electrode and optimizing its thickness, the light OCE is significantly improved and consequently the red QLEDs exhibit an external quantum efficiency (EQE) of 33.2%, which is 1.4-fold higher than that of the reference devices with conventional indium tin oxide (ITO) electrodes. Moreover, with a high refractive index plastic substrate and a microlens array, the EQE can further be improved to a record value of 37.5%. Similar results are obtained in green and blue devices, which show an EQE of 18.8% and 14.4%, respectively. We also predict that the theoretical EQE limit of red, green, and blue QLEDs can reach 35.4%–36.5%, 24.8%–34.0%, and 25.1%–35.8%, respectively, without using any light outcoupling structures. The proposed synergistic optimization strategy enables the efficiencies of red, green, and blue QLEDs to approach their theoretical limits.

研究领域: 光电子学 · 纳米技术 · 材料科学 · 固体物理 · 显示技术
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