Manufacturing Carbon-Doped Stamp With Surface Microstructures for Rapid and Reliable Micro-LED Transfer Process
The laser-assisted micro-transfer printing (Laser-assisted
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The laser-assisted micro-transfer printing (Laser-assisted
Group III–V semiconductor-based microscale light-emitting diode (micro-LED) displays are recognized as one of the most promising display technologies with superhigh brightness and resolution, strong contrast, and superlarge color gamut but currently suffer from low efficiency, low production yield, and high cost. Here, it is proposed to realize cost-effective and full-color micro-LED displays by using microscale perovskite quantum dot LEDs (micro-PeLEDs) as emitters. Bright and uniform red-, green-, and blue-emitting (RGB) micro-PeLED arrays with each pixel size as small as 45 µm are fabricated by in situ inkjet printing a perovskite quantum dot (PeQD) emissive layer in the structure of indium tin oxide/poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT:PSS)/poly(9-vinylcarbazole) (PVK)/sodium dodecyl sulfate (SDS)/PeQD/1,3,5-tris(1-phenyl-1 H -benzimidazol-2-yl)benzene (TPBi)/LiF/Al. These RGB micro-PeLED arrays display an external quantum efficiency of 0.832%, 0.419%, and 0.052% for red, green, and blue colors, a resolution of 210 PPI, and a wide color gamut (135% of the National Television Standards Committee standard). The authors further demonstrate flexible and full-color active-matrix micro-PeLED displays, which have potential applications in future ultrahigh-definition displays, light communication, and artificial intelligence.
Quantum dot (QD) color conversion layers (CCLs) present an economical and reliable approach to achieve full-color micro-LED displays. Microfluidic technology demonstrates significant advantages for patterning and integrating multicolor QDs, including high precision, rapid processing, low material consumption, and low fabrication costs. However, preparing high-resolution CCLs with low optical crosstalk remains challenging due to limitations in microfluidic chip design induced by swelling of polydimethylsiloxane (PDMS) microchannels in nonpolar solvents utilized for QD dispersion. In this study, we developed a QD solution with a polymer additive that effectively suppresses PDMS swelling, making injection of QD solution into small-sized PDMS microchannels on chromium-patterned microhole glass substrates possible. The resulting QD CCLs exhibit high luminescence uniformity and a high resolution of 1285 ppi, with a subpixel dimension of 5 μm × 5 μm, which is the smallest dimension reported for CCLs fabricated by microfluidic technology. Furthermore, our innovative integration of chromium-patterned microhole glass substrates within a microfluidic device provides unprecedented optical isolation, effectively eliminating intersubpixel crosstalk in CCLs. By integrating optimized red and green QD CCLs with a blue GaN micro-LED array, we successfully fabricated a full-color micro-LED prototype with a resolution of 600 ppi and a wide color gamut of 115% NTSC. Owing to their high resolution, uniform luminescence, and low optical crosstalk, the proposed microfluidic technology holds significant promise for advancing next-generation full-color micro-LED displays.
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