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DIAMOND AND RELATED MATERIALS · 2024 · IF 4.3

Microcontact printing fabrication of diamond MEMS cantilevers on silicon substrate

Biao Yan,Zhixin Zhao,Xiaojuan Wu,Haoran Li,Duo Liu

Diamond shows great potentials as an ultimate material candidate for application in microelectromechanical systems (MEMS). In this work, we report microcontact printing (μCP) transfer as a facile technique to fabricate diamond MEMS cantilever arrays. We started from the Deryaguin–Landau–Verwey–Overbeek (DLVO) principles and formulated a colloidal “ink” that contains nanodiamonds (NDs) seeds well dispersed in polymethyl methacrylate/acetone. The NDs seeds were then transfer printed onto a silicon (100) substrate by using a flexible polydimethylsiloxane (PDMS) stamp with predefined pattern. The densely packed NDs pattern (∼10 9  cm −2 ) enables facile and selected-area growth of diamond with microwave plasma chemical vapor deposition (MPCVD) technique. A diamond film with minimal graphite contaminants and low residual stresses was obtained after growth at 1118 K for 3 h. The diamond cantilevers were released from the substrate by wet chemical etching using KOH (40 % wt.) and isopropyl alcohol (10 % vol.). An examination of the vibrational kinetics indicates that the diamond film has a high Young's modulus (∼795 GPa) and the cantilevers exhibit consistently distributed resonant frequencies and high quality factors in ambient air. The method opens the door for large-scale, cost-effective production of uniform diamond MEMS devices for sensor and quantum applications.

研究领域: 材料科学 · 微机电系统 · 表面化学
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JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE · 2021 ·Vol. 30 ·期 4 ·2462-2472 · IF 1.819

Preparation and Tribological Properties of Graphene Oxide/Polydopamine-Derived Carbon Films on Silicon Substrate

Zang Chao,Yang Ming,Jia Zhengfeng,Zhang Jing,Jiang Jinlong,Li Wei,Su Changhua,Zhang Ran

In this study, dopamine and graphene oxide (GO) solutions were spin-coated on the silicon wafers to obtain the GO/polydopamine (PDA) films. The carbon films were subsequently fabricated by annealing the GO/PDA films in argon atmosphere. The atomic force microscopy analysis was performed to characterize the morphology and tribological properties of the composite films. The developed carbon films exhibited lower friction coefficient and high adhesion between composite films and substrate as compared to the untreated films, which was attributed to the enhanced hydrophobicity, improved hardness and elastic modulus and chemical bonding of the films with substrate. The findings obtained in this study would lead to an efficient design of the anti-wear nanofilms for the micro-/nanoelectronic mechanical systems.

CAS / MDL: 62-31-7
研究领域: 材料科学 · 纳米技术
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MATERIALS CHEMISTRY AND PHYSICS · 2016 · IF 2.101

A convenient way of manufacturing silicon nanotubes on a silicon substrate

Changchang Zhang,Heming Cheng,Xiang Liu

A convenient approach of preparing silicon nanotubes (SiNTs) on a silicon substrate is described in this work in detail. Firstly, a porous silicon (PSi) slice is prepared by a galvanic displacement reaction. Then it is put into aqueous solutions of 20% (w%) ammonium fluoride and 2.5 mM cobalt nitrate for a predetermined time. The cobalt ions are reduced and the resulted cobalt particles are deposited on the PSi slice. After the cobalt particles are removed with 5 M nitric acid a plenty of SiNTs come out and exhibit disorderly on the silicon substrate, which are illustrated by scanning electron microscopy (SEM). The compositions of the SiNTs are examined by energy-dispersive X-ray spectroscopy. Based on the SEM images, a suggested mechanism is put forward to explain the generation of the SiNTs on the PSi substrate.

研究领域: 材料科学 · 纳米技术
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APPLIED SURFACE SCIENCE · 2015 · IF 2.711

Investigation of carbon nanotube-containing film on silicon substrates and its tribological behavior

Zhiyong Sun,Xianhua Cheng

Carbon nanotubes (CNTs) were functionalized with Lanthanum (La) modifier and appropriate acid-treatment methods. CNT-containing film was deposited on silicon substrates via a self-assembly process. The formation and microstructure of La treated CNTs and CNT-containing film were characterized by high-resolution transmission electron microscopy (HRTEM), scanning electron microscopy (SEM), X-ray photoelectron spectrometry (XPS) and water contact angle (WCA). Its tribological properties were evaluated with a UMT-2MT reciprocating friction tester. The results show that CNTs were adsorbed on silicon substrates by means of chemically bonding between La and oxygen-containing functional groups. The friction coefficient of the silicon substrates is reduced from 0.87 to 0.12 after the deposition of CNT-containing film on its surface. CNT-containing film shows excellent antiwear, friction reducing ability and load-carrying capacity due to excellent mechanical and self-lubrication properties of CNTs.

CAS / MDL: 13822-56-5 10099-58-8
研究领域: 材料科学 · 摩擦学 · 表面工程
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CHINESE JOURNAL OF ANALYTICAL CHEMISTRY · 2013 · IF 0.769

Preparation of Porous Silicon Substrate for Protein Microarray Fabrication by Double-Cell Electrochemical Etching Method

Jian-Ming JI,Xiu-Xia HE,Qian DUAN,Zhen-Xin WANG

Uniformly porous silicon substrate with large surface area (12 mm × 58 mm) was prepared by double-cell electrochemical etching method. After functionalized with epoxide groups, the porous silicon substrate can be employed to fabricate protein microarray. In proof of principle experiment, well-known biomolecule recognition system (the interaction of mouse IgG with rabbit anti-mouse IgG antibody) was chosen to establish the new microarray format. It was found that the detection sensitivity of the mouse IgG microarray was dependent on preparing conditions of porous silicon substrate including etching current density, etching time, and concentration of HF. Under the optimal conditions (500 mA cm −2 etching current density, 450 s etching time and 25% HF), specific binding could be detected using rabbit anti-mouse IgG antibody at concentrations as low as 10 ng mL −1 with a dynamic range from 316 ng mL −1 to 10 μg mL −1 . The results demonstrate that the as-prepared porous silicon substrate could be used to fabricate the protein microarray with high reaction capability.

研究领域: 生物技术 · 材料科学 · 分析化学
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TRIBOLOGY LETTERS · 2022 ·Vol. 70 ·期 4 ·1-11 · IF 3.327

Composite Lubricating Films with Silane Coupling Agent-Modified Carbon Nanotubes on a Silicon Substrate with Enhanced Wear-Resistant Properties

Liu Sisi,Deng Yuxing,Sun He,Jiang Shengqiang,Liu Jingang

A modified carbon nanotube composite film was designed and prepared by self-assembled molecular film technology. The carbon nanotubes modified by 3-glycidoxypropyltrimethoxy-silane (KH560) were grafted onto a silicon substrate by using N-3-(trimethoxysilyl)propylethyl-enediamine (DA) molecules as an intermediate connecting layer. Compared with the silicon surface, the surface wettability of the modified carbon nanotube composite thin film changes from super-hydrophilic to hydrophobic. At the nanoscale, the surface adhesion and friction forces decreased by nearly 91% and 87%, respectively, and at the microscale, the friction coefficient was reduced by 84%. The anti-wear lifetime is prolonged to 72 min under an applied load of 1 N, which is over 35 times longer than that of silicon. Due to the great wear-resistant properties of modified carbon nanotubes, they are expected to be widely used in micro/nanoelectromechanical systems.

研究领域: 材料科学 · 纳米技术 · 表面工程
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ANALYTICAL AND BIOANALYTICAL CHEMISTRY · 2025 · IF 3.8

Impact of silicon substrate on micro gas chromatographic column using ALD alumina as the stationary phase

Ma Shaojie,Zhu Yuchen,Li Wenbo,Chen Boxin,Zhao Bin,Feng Fei

Due to the high conformal films, atomic layer deposition (ALD) alumina has been used as a uniform stationary phase or support layer of stationary phase for micro gas chromatographic column. However, the severe tailing of chromatographic peaks appears when ALD alumina is used as the stationary phase. Recently, an H-diffusion model was proposed to explain the H accumulation phenomenon of ALD alumina films. Compared with the normal-resistance silicon substrates, the ALD alumina films based on low-resistance silicon substrates have fewer H impurities, which may further improve the tailing of chromatographic peaks and the theoretical number of plates. In this paper, a micro gas chromatographic column based on the low-resistance silicon (LR-μGCC) substrate (resistivity, 0.001–0.005 Ω·cm) using alumina deposited by atomic layer deposition as the stationary phase is reported. Compared with normal-resistance silicon substrates (resistivity, 1–10 Ω·cm), the micro gas chromatographic columns (μGCC) prepared on low-resistance silicon substrates have a higher separation performance. The test results showed that the LR-μGCC increased the theoretical plate number of alkane mixtures (n-hexane, n-octane, n-nonane, and n-decane) by 20.9%, 74.8%, 139.4%, and 55.4%, respectively, and reduced the tailing factor by 13.0%, 41.8%, 48.6%, and 49.1%, respectively. Graphical

研究领域: 分析化学 · 材料科学
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Functional Diamond · 2025 · IF 4

Controlled seeding density of nanodiamonds on silicon and its influence on diamond film adhesion

Zhicheng Xing,Stephan Handschuh-Wang,Tao Wang,Peigang Han,Bin He

Several parameters are known to influence the adhesion of diamond coatings to non-diamond substrates. In the current work, we investigate the effect of seeding density on the adhesion of microcrystalline diamond coatings on silicon substrates. To this end, controlled seeding densities on silicon substrates were established by an electrostatic self-assembly seeding strategy. The seeding density was altered by changing the wt% of the ND colloidal seed solution while maintaining the pH and surfactant concentration. This resulted in colloidally stable ND particles with virtually constant hydrodynamic diameter (ca. 30 nm) and Zeta potential (ca. +32 mV) while the wt% of the ND in the colloid was altered between 0.00033 and 0.1 wt%. With these diluted solutions the seeding density was controlled between 4 × 108 cm−2 and 1.95 × 1011 cm−2. Subsequently, microcrystalline diamond coatings with a thickness of 3.1 ± 0.1 µm were grown. The adhesion of the diamond coating to the silicon substrate was evaluated by indentation. Best adhesion was found for a seeding density of 1.81 × 1011 cm−2, featuring no delamination and low sample to sample variation. Counterintuitively, further increase in seeding density resulted in an increase of crack length and sample to sample variation. This decline in adhesion was attributed to ND aggregates formed during the seeding step, which either desorb or form areas with poor diamond-silicon bonding upon diamond growth. Therefore, this result is of import for diamond film adhesion studies and commercial diamond coated cutting tools using high seeding densities being prone to aggregation.

研究领域: 材料科学 · 表面工程 · 纳米技术
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ACS Nano · 2018 · IF 13.709

Broadside Nanoantennas Made of Single Silver Nanorods

Xiaolu Zhuo,Hang Kuen Yip,Qifeng Ruan,Tiankai Zhang,Xingzhong Zhu,Jianfang Wang,Hai-Qing Lin,Jian-Bin Xu,Zhi Yang

Directional optical nanoantennas are often realized by nanostructured systems with ingenious or complex designs. Herein we report on the realization of directional scattering of visible light from a simple configuration made of single Ag nanorods supported on Si substrates, where the incident light can be routed toward the two flanks of each nanorod. Such an intriguing far-field scattering behavior, which has not been investigated so far, is proved to result from the near-field coupling between high-aspect-ratio Ag nanorods and high-refractive-index Si substrates. A simple and intuitive model is proposed, where the complicated plasmon resonance is found to be equivalent to several vertically aligned electric dipoles oscillating in phase, to understand the far-field properties of the system. The interference among the electric dipoles results in wavefront reshaping and sidewise light routing in a similar manner to the broadside antenna described in the traditional antenna theory, allowing for the naming of these Si-supported Ag nanorods as “broadside nanoantennas”. We have carried out comprehensive experiments to understand the physical origins behind and the affecting factors on the directional scattering behavior of such broadside nanoantennas.

CAS / MDL: 112-02-7
研究领域: 光学 · 纳米技术 · 材料科学
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APPLIED SURFACE SCIENCE · 2016 · IF 3.15

Upconversion and tribological properties of β-NaYF4:Yb,Er film synthesized on silicon substrate

Chuanying Wang,Xianhua Cheng

In this work, β-NaYF 4 :Yb,Er upconversion (UC) film was successfully prepared on silicon (Si) substrate via self-assemble method for the first time. The chemical composition and surface morphology of the UC film were characterized by Fourier transform infrared spectroscopy (FT-IR), X-ray photoelectron spectroscopy (XPS), water contact angle (WCA), X-ray power diffraction (XRD), and scanning electron microscopy (SEM) measurements. To investigate the effects of KH-560 primer film and chemical reactions on the UC luminescence properties of β-NaYF 4 :Yb,Er UC film, decay profiles of the 540   nm and 655   nm radiations were measured. Furthermore, tribological test was applied to qualitatively evaluate the adhesion of the UC film. The results indicate that the UC film has been successfully prepared on Si substrate by covalent chemical bonds. This work provides a facile way to synthesize β-NaYF 4 :Yb,Er UC film with robust adhesion to the substrate, which can be applicable for other UC films.

研究领域: 材料科学 · 光学 · 表面工程
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CHINESE JOURNAL OF POLYMER SCIENCE · 2015 ·Vol. 33 ·期 10 ·1470-1476 · IF 1.835

Surface-enhanced Raman scattering effect of ordered gold nanoparticle array for rhodamine B with different morphologies

Zu Xi-hong,Jian Zhi-hui,Yi Guo-bin,Huang Hai-liang,Zhong Ben-bin,Luo Hong-sheng,Huang Jia-rong,Wang Cui

In this study, well-ordered gold nanoparticle array on silicon substrate was adopted as an active surface-enhanced Raman scattering substrate for detecting rhodamine B (RB), and the influence of RB morphologies on surface-enhanced Raman scattering (SERS) properties was discussed. The Au nanoparticle array was prepared by using patterned P4VP nanodomains of poly(styrene- b -4-vinylpyridine) (PS- b -P4VP) diblock copolymer thin films as nanoreactors which is a simple and economical approach. The results show that Raman spectra of RB on the Au nanopaticle array have much stronger intensity than those on the bare silicon substrate by detecting same RB solution. It indicates that the prepared Au nanoparticle array on silicon substrate has a significant Raman enhancement for RB. Interestingly, the Raman intensity of RB from its ethanol solution is much stronger than that from its aqueous solution due to the special morphologies of RB formed in their ethanol solutions. This work provides an effective approach to prepare highly sensitive and stable surface-enhanced Raman scattering substrate.

研究领域: 材料科学 · 分析化学
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RSC Advances · 2015 ·Vol. 5 ·期 115 ·94980-94985 · IF 3.84

Synthesis of a NaYF4:Yb,Er upconversion film on a silicon substrate and its tribological behavior

Chuanying Wang,Xianhua Cheng

In this work, amino-functionalized NaYF4:Yb,Er upconversion nanoparticles (UCNPs) were synthesized by a hydrothermal method. Then a simple self-assembly method was carried out to prepare a NaYF4:Yb,Er upconversion (UC) film on a silicon (Si) substrate, using γ-(2,3-epoxypropoxy)propyltrimethoxysilane (KH-560) as an intermediate coupling agent. The chemical composition and surface morphology of the UC film were characterized using X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FT-IR), water contact angle (WCA), and scanning electron microscopy (SEM) measurements. Furthermore, the tribological properties of the UC film were investigated by a UMT tester. The results indicate that the UC film has been successfully prepared on the Si substrate by the formation of chemical bonds and its lifetime is about five times longer than that of the NaYF4:Yb,Er UCNPs on a bare Si substrate. This work provides a facile way to synthesize a NaYF4:Yb,Er UC film with robust adhesion to the substrate, which can be applicable for other UC films.

研究领域: 材料科学 · 表面工程 · 纳米技术
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