JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
·
2021
·Vol. 40
·期 1
·
IF 2.427
Hsain Hanan Alexandra,Lee Younghwan,Materano Monica,Mittmann Terence,Payne Alexis,Mikolajick Thomas,Schroeder Uwe,Parsons Gregory N.,Jones Jacob L.
Although 10 years have passed since the initial report of ferroelectricity in hafnia (HfO 2 ), researchers are still intensely fascinated by this material system and the promise it holds for future applications. A wide variety of deposition methods have been deployed to create ferroelectric HfO 2 thin films such as atomic layer deposition, chemical solution deposition, and physical vapor deposition methods such as sputtering and pulsed laser deposition. Process and design parameters such as deposition temperature, precursor choice, target source, vacuum level, reactive gases, substrate strain, and many others are often integral in stabilizing the polar orthorhombic phase and ferroelectricity. We examine processing parameters across four main different deposition methods and their effect on film microstructure, phase evolution, defect concentration, and resultant electrical properties. The goal of this review is to integrate the process knowledge collected over the past 10 years in the field of ferroelectric HfO 2 into a single comprehensive guide for the design of future HfO 2 -based ferroelectric materials and devices.
研究领域:
材料科学
·
电子工程
✓ 已验证
DOI
高影响因子
NANOTECHNOLOGY
·
2024
·Vol. 35
·期 23
·235301
·
IF 2.9
Huan Yang,Xinbing Jiang,Manman Zhang,Ben Q Li,Jiajie Wang,Yiping Han
We report a structure of silicon eccentric shell particles array, fabricated by the SiO2 particles monolayer array assisted deposition of amorphous Si, for high-efficiency light confinement. The SiO2 particles monolayer array is tailored to regulate its interparticle distance, followed by silicon film deposition to obtain silicon eccentric shell arrays with positive and negative off-center distance e. We studied the Mie resonances of silicon solid sphere, concentric shell, eccentric shell and observed that the eccentric shell with positive off-center e supports superior light confinement because of the enhanced Mie magnetic resonances. Spectroscopic measurements and finite difference time domain simulations were conducted to examine the optical performance of the eccentric shell particles array. Results show that the Mie magnetic resonance wavelength can be easily regulated by the size of the inner void of the silicon shell to realize tunable enhanced light confinement. It was found silicon shell with D = 460/520 nm offered high enhanced light absorption efficiency at wavelength of λ = 830 nm, almost beyond the bandgap of the amorphous silicon.
研究领域:
纳米材料
·
光学工程
·
材料科学
✓ 已验证
产品关联
DOI
PubMed
高影响因子
THIN SOLID FILMS
·
2024
·
IF 2
Xinglei Cui,Long Li,Zhonglian Li,Runhua Li,Yizhuo Wang,Xi Zhu,Zhi Fang
Film deposition with atmospheric pressure plasma jet (APPJ) is an effective approach to enhance surface performances of insulating materials for its high reactivity and flexible operation. However, the plasma-activated precursor will inevitably produce inner-wall contamination in the dielectric tube as it travels through the electrode gap, deteriorating film deposition stability during long-term operation. In this paper, a post-mixing precursor feedthrough is designed to suppress the dielectric tube contamination and improve film deposition stability. The influences of traditional pre-mixing feedthrough and post-mixing feedthrough proposed in this paper on discharge and film deposition stability are compared. The thickness of inner-wall contamination is acquired by image processing technique. The electrical and optical discharge characteristic variations with operation duration are diagnosed to evaluate the discharge stability. The film performance is characterized by the water contact angle (WCA) and flashover voltage. Finally, scanning electron microscope (SEM) and X-ray photoelectron spectroscopy (XPS) measurements are performed for the film physicochemical property variations to explore the mechanism about the effect of precursor feedthrough on film deposition stability. The results indicate that the thickness of the contamination is reduced by 79.9 % for the post-mixing feedthrough after a 30-minute operation. Contamination growth increases the initial discharge voltage and decreases the discharge strength, which is remarkably inhibited for the post-mixing feedthrough. The degradation of WCA and flashover voltage for the post-mixing feedthrough is <10 % after a 30-minute operation. The film physicochemical properties for the post-mixing feedthrough exhibit no spectacular change according to SEM and XPS results. Whereas, the ratio of high-oxidized silicone bonds for the pre-mixing feedthrough is reduced and the degree of cross-linking is drastically decreased. This paper provides a reference for optimizing precursor feedthrough to improve the stability of film deposition with APPJ.
研究领域:
材料科学
·
等离子体物理
·
表面工程
✓ 已验证
产品关联
DOI
高影响因子
NATURE
·
2022
·Vol. 612
·期 7939
·266-271
·
IF 69.504
Chen Changshun,Chen Jianxin,Han Huchen,Chao Lingfeng,Hu Jianfei,Niu Tingting,Dong He,Yang Songwang,Xia Yingdong,Chen Yonghua,Huang Wei
One potential advantage of perovskite solar cells (PSCs) is the ability to solution process the precursors and deposit films from solution 1 , 2 . At present, spin coating, blade coating, spray coating, inkjet printing and slot-die printing have been investigated to deposit hybrid perovskite thin films 3 , 4 , 5 , 6 . Here we expand the range of deposition methods to include screen-printing, enabled by a stable and viscosity-adjustable (40–44,000 cP) perovskite ink made from a methylammonium acetate ionic liquid solvent. We demonstrate control over perovskite thin-film thickness (from about 120 nm to about 1,200 nm), area (from 0.5 × 0.5 cm 2 to 5 × 5 cm 2 ) and patterning on different substrates. Printing rates in excess of 20 cm s −1 and close to 100% ink use were achieved. Using this deposition method in ambient air and regardless of humidity, we obtained the best efficiencies of 20.52% (0.05 cm 2 ) and 18.12% (1 cm 2 ) compared with 20.13% and 12.52%, respectively, for the spin-coated thin films in normal devices with thermally evaporated metal electrodes. Most notably, fully screen-printing devices with a single machine in ambient air have been successfully explored. The corresponding photovoltaic cells exhibit high efficiencies of 14.98%, 13.53% and 11.80% on 0.05-cm 2 , 1.00-cm 2 and 16.37-cm 2 (small-module) areas, respectively, along with 96.75% of the initial efficiency retained over 300 h of operation at maximum power point.
研究领域:
材料科学
·
可再生能源
·
化学工程
✓ 已验证
产品关联
DOI
PubMed
高影响因子
InfoMat
·
2023
·Vol. 5
·期 4
·e12400
·
IF 22.7
Shuo Chen,Yi Fu,Muhammad Ishaq,Chuanhao Li,Donglou Ren,Zhenghua Su,Xvsheng Qiao,Ping Fan,Guangxing Liang,Jiang Tang
Antimony selenide (Sb 2 Se 3 ) is a promising candidate for photodetector applications boasting unique material benefits and remarkable optoelectronic properties. Achieving high-performance self-powered Sb 2 Se 3 photodetector through a synergistic regulation of absorber layer and heterojunction interface demonstrates great potential and needs essential investigation. In this study, an effective two-step thermodynamic/kinetic deposition technique containing sputtered and selenized Sb precursor is implemented to induce self-assembled growth of Sb 2 Se 3 light absorbing thin film with large crystal grains and desirable [hk1] orientation, presenting considerable thin-film photodetector performance. Furthermore, aluminum (Al 3+ ) cation dopant is introduced to modify the optoelectronic properties of CdS buffer layer, and further optimize the Sb 2 Se 3 /CdS (Al) heterojunction interface quality. Thanks to the suppressed carrier recombination and enhanced carrier transport kinetics, the champion Mo/Sb 2 Se 3 /CdS (Al)/ITO/Ag photodetector exhibits self-powered and broadband characteristics, accompanied by simultaneously high responsivity of 0.9 A W −1 (at 11 nW cm −2 ), linear dynamic range of 120 dB, impressive ON/OFF switching ratio over 10 6 and signal-to-noise ratio of 10 9 , record total noise determined realistic detectivity of 4.78 × 10 12 Jones, and ultra-fast response speed with rise/decay time of 24/75 ns, representing the top level for Sb 2 Se 3 -based photodetectors. This intriguing work opens up an avenue for its self-powered broadband photodetector applications.
研究领域:
材料科学
·
光电子学
·
半导体物理
·
纳米器件
·
功能材料
·
固态电子学
·
薄膜技术
✓ 已验证
DOI
高影响因子
CHEMICAL ENGINEERING JOURNAL
·
2025
·
IF 13.2
Zijian Zhang,Xiuyang Tang,Yu Gao,Xinming Ma,Kaihan Chang,Lipin Chen,Song Xue,Gangri Cai,Jin Shi Zhao
Two-dimensional (2D) materials have drawn extensive interest for applications in thin-film electronics, optoelectronics, and sensing. Among them, tin disulfide (SnS 2 ) is particularly attractive owing to its low cost, environmental friendliness, and excellent chemical and thermal stability. Importantly, the synthesis and deposition strategies for 2D materials play a critical role in controlling sulfur vacancies, tuning crystal phase and morphology, and ultimately determining device performance. Here, we demonstrate a solution-processed memristor based on SnS-SnS 2 composite thin films fabricated by spin-coating followed by sequential thermal reduction. Partial conversion of SnS 2 into SnS produces a phase-engineered architecture, where vertically aligned SnS domains are embedded within the SnS 2 matrix. Optimizing the SnS/SnS 2 ratio enhances resistive switching (RS) characteristics and synaptic emulation. The improved device behavior is mainly attributed to the controlled generation and migration of sulfur vacancies, together with internal phase modulation enabled by the vertical stacking structure. This scalable, low-temperature strategy provides a promising route toward high-performance neuromorphic memory devices.
研究领域:
材料科学
·
纳米电子学
·
神经形态计算
·
薄膜技术
✓ 已验证
产品关联
DOI
高影响因子
RSC Advances
·
2019
·Vol. 9
·期 16
·9006-9013
·
IF 3.049
Shengli Mi,Jingjing Xia,Yuanyuan Xu,Zhichang Du,Wei Sun
In this study, we developed an electrochemical microchannel biosensor platform to analyse lactate metabolism in cells. This biosensor platform was fabricated by photolithography, thin-film deposition and microfluidic technology. A kind of functional biomaterial was prepared by mixing lactate oxidase, single-walled carbon nanotubes and chitosan, and platinum as working and blank electrodes of the biosensor was modified by a thin Prussian blue layer. The lactate biosensor was obtained by dropping functional biomaterials on the electrode. The results demonstrated that the sensitivity of the electrochemical biosensor was up to 567 nA mM−1 mm−2 and the limit of detection was 4.5 μM (vs. Ag/AgCl as the counter/reference electrode). The biosensor used to quantitatively detect metabolic lactate concentrations in HepG2 cells cultured with cancer drugs showed high sensitivity, selectivity and stability, and has potential applications in organ-on-a-chip and tissue engineering technologies, which typically involve low concentrations of metabolites.
研究领域:
生物技术
·
生物工程
·
分析化学
·
细胞生物学
✓ 已验证
产品关联
DOI
PubMed
高影响因子
ACS Applied Electronic Materials
·
2025
·
IF 4.7
Jiayi Li,Yuhuan Lin,Zehao Zhang,Kunlun Jiang,Jun Shao,Jiayu Zheng,Yunfeng Shi,Jiandong Fan,Wenzhe Li
All-inorganic cesium lead halide (CsPbX3, X = I–, Br–, Cl–) perovskite solar cells (PSCs) show great promise for photovoltaics due to their excellent thermal stability. However, their power conversion efficiency still lags behind that of hybrid perovskites, primarily due to the high defect densities caused by uncontrolled crystallization and the persistence of residual intermediate phases. To tackle this fundamental challenge, we developed a temperature-control strategy that regulates the wet-coating temperature during film deposition. This approach effectively modulates crystallization kinetics by balancing nucleation and growth rates, which significantly suppresses the formation of intermediate phases and promotes direct conversion to a phase-pure perovskite. As a result, the film morphology is greatly improved and trap states are reduced, leading to a remarkable enhancement in device performance. This study establishes the wet-coating temperature as a critical factor in controlling crystallization pathways and film quality, providing both deep mechanistic insights and a practical fabrication strategy for high-performance, operationally stable all-inorganic PSCs.
研究领域:
光伏
·
材料科学
·
薄膜沉积
·
晶体生长
·
可再生能源
✓ 已验证
产品关联
DOI
高影响因子
ACS Applied Materials & Interfaces
·
2025
·
IF 8.2
Chun Li,Jiaxun Yao,Jiayi Xu,Huanhuan Yang,Guangfu Luo,Yanhao Yu
Nucleation behavior governs the selectivity of area-selective atomic layer deposition (AS-ALD). Ideally, nontargeted regions should exhibit delayed nucleation or sparse nucleation that can be easily removed by post-treatment. Here, we report a burst nucleation phenomenon during AS-ALD on perfluoroalkyl self-assembled monolayer (SAM)-treated surfaces. Burst nucleation results in discontinuous particle deposition with weak interfacial adhesion on nontargeted regions, in contrast to the progressive nucleation that forms uniform and adherent films on alkyl SAMs. These weakly adhered particles can be completely removed by gentle wiping without affecting the ALD film in targeted areas. The burst window depends on the SAM chain length, the ALD precursor, and the ALD temperature. When applied to Cu/SiO2 substrates, the nucleation control enables 99.9% selectivity after 30 cycles of Al2O3 ALD, while that of alkyl SAMs is 52.2%. The burst nucleation strategy is broadly effective for enhancing the selectivity of AS-ALD oxides (e.g., ZrO2, HfO2, ZnO) and polymers (e.g., polyimide).
研究领域:
材料科学
·
纳米技术
·
薄膜沉积
·
表面化学
·
半导体工艺
✓ 已验证
产品关联
DOI
PubMed
高影响因子
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
·
2021
·
IF 8.067
Lei Zhang,Feng Xu,Jian Zhang,Baoru Bian,Yong Hu,Fei Xue,Juan Du
Magnetically anisotropic nanoparticle monolayer films are of great interest for the development of applications such as high-density data storage, sensors. However, the formation of large-scale magnetically anisotropic monolayer film is a challenging task. Here, we provide a new way to fabricate large-scale area of Fe 3 O 4 nanoparticle monolayer films by vacuum deposition technique (matrix-assisted pulsed laser evaporation, MAPLE). During the deposition process, only interactions between nanoparticles influence nanoparticle self-assembly behaviors. A strong magnetic anisotropy, characterized by in-plane and out-of-plane coercivity and saturation field obtained by DCM (dynamic cantilever magnetometry), was obtained both in cubic and spherical Fe 3 O 4 nanoparticle monolayer films. The inter-particle dipolar interaction but not crystal anisotropy is responsible for this effective magnetic anisotropy, which has been proved by Monte-Carlo simulations.
研究领域:
材料科学
·
纳米技术
·
磁性材料
·
薄膜沉积
✓ 已验证
DOI
高影响因子
Advanced Sustainable Systems
·
2019
·Vol. 3
·期 5
·1900026
·
IF 0
Yanyan Wang,Xue Yu,Gen Liu,Xiaodong Zhu,Rui Xu,Mei Ji,Yanqing Ma,Lei Ma
Proton exchange membrane water electrolysis (PEMWE) is known as an effective and environmental-friendly method for hydrogen production. However, the process is hindered by the necessity of large loading of high-priced noble metals in the conventional approaches. To resolve this problem, a highly efficient Nafion-based catalyst and proton exchange system are developed, which only need ultralow platinum loading by direct e-beam evaporation deposition. Scanning electron microscopy is performed before and after the deposition, which reveals a very smooth morphology. By assembling the PEMWE device with above-mentioned cathode and conventional iridium black anode, the current density reaches 500 mA cm −2 with a platinum loading of only 0.00379 mg cm −2 at 1.64 V under 80 °C. A mass activity of ≈132 A mg −1 is achieved, which is one order of magnitude higher than previously reported results. Moreover, powered by a commercial silicon solar cell, it realizes a solar-to-hydrogen conversion efficiency up to 8.26%. This work opens up an avenue of fabricating PEMWE with an ultralow catalyst loading, which may have enormous potential for future industrial scale applications.
研究领域:
能源材料
·
电化学
·
氢气生产
·
薄膜沉积
✓ 已验证
DOI
CHEMISTRY OF MATERIALS
·
2016
·
IF 9.407
Hao Li,Youdong Shao,Yantao Su,Yuanhong Gao,Xinwei Wang
Vapor-phase atomic layer deposition (ALD) of nickel sulfide (NiSx) is comprehensively reported for the first time. The deposition process employs bis(N,N′-di-tert-butylacetamidinato)nickel(II) and H2S as the reactants and is able to produce fairly smooth, pure, godlevskite-structured NiSx thin films following an ideal layer-by-layer ALD growth fashion for a relatively wide process temperature range from 90–200 °C. Excellent conformal coating is demonstrated for this ALD process, as the deposited NiSx films are able to uniformly and conformally cover deep narrow trenches with aspect ratio as high as 10:1, which highlights the general and broad applicability of this ALD process for fabricating complex 3D-structured nanodevices. Further, we demonstrate the applications of this ALD NiSx for oxygen-evolution reaction (OER) electrocatalysis. The ALD NiSx is found to convert to nickel (oxy)hydrate after electrochemical aging, and the aged product shows a remarkable electrocatalytic activity and long-term stability, which is among the best electrocatalytic performance reported for nonprecious OER catalysts. Considering that ALD can be easily scaled up and integrated with 3D nanostructures, we believe that this ALD NiSx process will be highly promising for a variety of applications in future energy devices.
研究领域:
材料科学
·
电化学
·
纳米技术
·
能源存储与转换
·
薄膜沉积
✓ 已验证
DOI
高影响因子
危险品化学品经营许可证（带存储）