Yunwen Wu,Mengyun Zhang,Yuhang Jiang,Yiting Tong,Pengfei Chang,Tao Hang,Ming Li
Electrodeposition is a key technology for 3D interconnect in electronic devices, while additives play an essential role in realizing super-filling in 3D interconnect. In this work, the impact of phenyl methyl sulfoxide (PMSO) on cobalt electrodeposition is studied and the underlying mechanism is explored. It is demonstrated that PMSO exhibits excellent inhibition ability even at relatively low concentrations due to its high chemical reactivity, contributed by the active sulfoxide group. We find that a proper concentration (20 ppm) of PMSO is important to achieve low surface roughness around 3.9 nm and uni-hcp (002) orientation due to the effective surface absorption. The nucleation of cobalt is altered to progressive nucleation under the influence of PMSO from instantaneous nucleation in the absence of PMSO, resulting in an even cobalt deposition behavior. Furthermore, the presence of PMSO enhances the wettability and enables the super-filling of cobalt TSV trenches with high quality, thereby indicating that PMSO is an effective additive for practical applications.
Li Hao-Nan,Sun Ze-Yu,Yu Zhen-Jie,Man Kexin,Zhang Chao,Xu Zhi-Kang
Mixed matrix membranes (MMMs) capable of breaking the permeability-selectivity trade-off suffer from the inefficient and disconnected bulky transport channels as well as inferior interfacial compatibility between nanomaterials and polymers. Herein, we propose an original photothermal-triggered in-situ gelation approach to elaborate an original class of MMMs, termed nanofiber-interwoven gel membranes (NIGMs) that feature tunable 3D-interconnected ultrafast transport channels and highly-selective CO 2 -philic gel for boosting CO 2 separation performance. The key design of NIGMs lies in leveraging dual functions of CNT-interwoven skeleton: (1) serving as a photothermal confined reactor that rapidly triggers in-situ gelation of highly-selective CO 2 -philic gel without phase separation-induced interfacial defects to construct defect-free and thickness-controllable NIGMs; (2) functioning as a 3D-interconnected continuous skeleton for providing ultrafast CO 2 transport channels. By orchestrating the distribution and configuration of interwoven nanofibers, the NIGMs possess a boosted CO 2 permeance of 211.0 GPU increased by 1558% over polymeric gel counterparts and an ultrahigh CO 2 /N 2 and CO 2 /CH 4 selectivity of up to 151 and 47 respectively. Our work offers a paradigm shift in developing advanced MMMs beyond gas separation.
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