Le Zhai,Xueli Yang,Liunan She,Yingqi Di,Guofeng Pan,Jie Cheng
The chemical mechanical polishing (CMP) process for the titanium (Ti) barrier layer in Through-Silicon Via (TSV) technology is crucial for the fabrication of advanced 3D and 2.5D integrated circuit (IC) chip packaging. A major challenge in this process is achieving a high Ti removal rate while carefully optimizing the selectivity ratio between Ti and copper (Cu). This study rationally selected 2-phosphonobutane-1,2,4-tricarboxylic acid (PBTCA) as a complexing agent and α-benzoin oxime (ABO) as a corrosion inhibitor in CMP for TSV Ti-based barrier layers. A combined experimental and theoretical approach was used to explore the CMP effects of the two reagents. The experimental results demonstrate that PBTCA significantly enhances the Ti removal rate, while the adsorption of ABO on the Cu surface mitigates the corrosion caused by PBTCA and effectively improved the surface quality of both Cu and Ti. Density Functional Theory (DFT) calculations were performed to analyze the interaction between PBTCA and ABO molecules at the atomic level. This study presents an effective method for removing Ti barrier layers from TSV by using PBTCA and ABO synergistically, providing a practical and effective solution for barrier layer CMP in advanced IC packaging applications.
Jie Zhou,Youjun Zeng,Xueliang Wang,Changlin Wu,Zhiwen Cai,Bruce Zhi Gao,Dayong Gu,Yonghong Shao
In this study, a wavelength-interrogated surface plasmon resonance imaging-based immunosensor was developed for ABO blood typing. To construct the immunosensor, the detection line array was formed by the site-directed immobilization of blood group antibodies on SPR chip modified with antibody-binding proteins. Red blood cell (RBC) samples were flowed into the multichannel flow cell that was orthogonal to the detection line arrays. By serially analyzing the interaction between RBCs, antibody A, and antibody B through the observed changes in the resonance dip, blood typing of four RBC samples was achieved in a single run. Detailed investigations focused on optimizing the conditions that affected the efficiency and sensitivity of immunoassay. Under the optimized conditions, the RBC samples were appropriately grouped in less than 1 h, including chip modification time. The lowest detection limit for RBC-A and RBC-B was 2×10 6 cells/ml. The immunosensor developed through this study provided a simple, rapid, high-throughput, and sensitive immunology strategy for classification of ABO blood group.
Hong Zhang,Xiaopei Qiu,Yurui Zou,Yanyao Ye,Chao Qi,Lingyun Zou,Xiang Yang,Ke Yang,Yuanfeng Zhu,Yongjun Yang,Yang Zhou,Yang Luo
Fast and simultaneous forward and reverse blood grouping has long remained elusive. Forward blood grouping detects antigens on red blood cells, whereas reverse grouping identifies specific antibodies present in plasma. We developed a paper-based assay using immobilized antibodies and bromocresol green dye for rapid and reliable blood grouping, where dye-assisted color changes corresponding to distinct blood components provide a visual readout. ABO antigens and five major Rhesus antigens could be detected within 30 s, and simultaneous forward and reverse ABO blood grouping using small volumes (100 μl) of whole blood was achieved within 2 min through on-chip plasma separation without centrifugation. A machine-learning method was developed to classify the spectral plots corresponding to dye-based color changes, which enabled reproducible automatic grouping. Using optimized operating parameters, the dye-assisted paper assay exhibited comparable accuracy and reproducibility to the classical gel-card assays in grouping 3550 human blood samples. When translated to the assembly line and low-cost manufacturing, the proposed approach may be developed into a cost-effective and robust universal blood-grouping platform.
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