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MEMS技术
Surfaces and Interfaces · 2025 · IF 6.3

Enhanced Ethanol Detection: A High-Performance MEMS Sensor Utilizing Pt-Modified SnO2-TiO2 Composite Nanomaterials

Danyang Wang,Menghan Xu,Kuangyi Li,Yong Yan,Xue Chen,Dongqi Yu,Rongrong Jia,Lei Huang

Ethanol sensors with low energy consumption and high performance have been applied in a wide range of areas. In this work, Pt-modified SnO 2 -TiO 2 composite nanomaterials prepared through ball milling and impregnation-reduction are fabricated for constructing microelectromechanical systems (MEMS) ethanol sensor. Tiny Pt nanoparticles are found uniformly dispersed on SnO₂-TiO₂. High quality gas-sensitive films are concentrated in the functional area of the MEMS chip. The loading of Pt significantly enhances the response to ethanol and reduced the optimal operating temperature. The 1.5% platinum-modified composite (A-ST) demonstrates a significant improvement in sensitivity to 50 ppm ethanol, with its response rising from 21.3 to 52.1, while the optimal operating temperature is reduced by 28°C, dropping from 288°C to 260°C. The limit of detection (LOD) is 240 ppb. This enhancement is primarily due to the n-n junction at the interface between SnO 2 and TiO 2 , along with the chemical and electronic sensitization effects generated by Pt on SnO 2 -TiO 2 .

CAS / MDL: 13463-67-7
研究领域: 材料科学 · 传感器技术 · 纳米科技
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ACS Applied Nano Materials · 2025 · IF 5.5

Oxygen-Vacancy-Rich SnO2 Nanoparticles Based Ultralow-Power MEMS Sensor for Nitrogen Dioxide Detection

Yong Yan,Xigui Lan,Yuzhou Li,Meihua Liang,Xiaodong Liu,Jiaxuan Yang,Rongrong Jia,Yuanyuan Ge,Zhili Li,Lei Huang

The development of highly sensitive and ultralow-power NO2 sensors is crucial for real-time NO2 monitoring. This study synthesizes tiny SnO2 nanoparticles with enriched oxygen vacancies for use in microelectromechanical system (MEMS) gas sensors, enabling ppb-level NO2 detection at reduced operating temperatures. PVP was used to adjust the particle size and surface oxygen vacancies in the hydrothermal method. The gas sensing performance shows that the 0.75 g PVP-SnO2 exhibited the highest response of 14.7 to 500 ppb NO2 at a low operating temperature of 102 °C, which is 3.2 times higher than that of the 0.00 g PVP-SnO2 sensor under the same conditions. Compared to similar studies, this sensor achieved a high response value and ultralow power consumption of 8.4 mW. The improvement in performance is mainly attributed to N doping and the abundance of oxygen vacancies. This research presents a promising strategy for the development of high-performance, low-energy, real-time NO2 gas sensors.

CAS / MDL: 25249-54-1 9003-39-8
研究领域: 材料科学 · 环境监测 · 传感器技术
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JOURNAL OF CHROMATOGRAPHY A · 2021 · IF 4.759

A semi-packed gas chromatography column with high-density elliptic cylindrical posts

Boxin Chen,Fei Feng,Yangyang Zhao,Qiyong Liu,Bin Zhao,Lei Li,Haimei Zhou,Xinxin Li

Semi-packed columns are microfabricated gas chromatography columns which have a large surface area and high aspect ratio. In this paper, a new semi-packed column with high-density elliptic cylindrical posts (SC HECP) made by a micro-electro-mechanical system (MEMS) technique was reported. Compared to a semi-packed column with cylindrical posts (SC CP) under the same effective width, the surface area and aspect ratio of SC HECP were improved by 71.19% and 76.47%, respectively. To compare the performance of these two semi-packed columns, SC HECP and SC CP were fabricated. A 10-nm thick alumina film was deposited as the stationary phase by atomic layer deposition technique to ensure the uniformity and repeatability of the stationary-phase film. A contrast experiment was conducted, and the results showed that compared with SC CP, better separation performance was realized in SC HECP due to the increase in surface area and aspect ratio. The number of theoretical plates of nonane was increased by 541.84%, and the tailing factor was decreased by 54.31%.

研究领域: 分析化学 · 微纳米技术 · 色谱技术
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CHINESE JOURNAL OF ANALYTICAL CHEMISTRY · 2019 · IF 0.931

High Performance Micro Gas Chromatography Column Using Mesoporous Silica as Stationary Phase

Xue-Lei YANG,Bin ZHAO,Fei FENG,Hai-Mei ZHOU,Heng YANG,Xin-Xin LI

A semi-packed micro gas chromatography (μGC) column embedded micro-elliptical pillars was fabricated based on micro- electro-mechanical system (MEMS) technique. The mesoporous silica (MS) film with 2-nm pore size and large specific surface area was coated on the inner surface of the μGC column as stationary phase. A baseline separation of alkanes (C5–C10) was realized by the μGC column which used MS as stationary phase, and the resolution of pentane and solvent (impurity) was as large as 3.6. Compared with the μGC column which used polydimethylsiloxane (PDMS) as stationary phase under the same injection volume, the number of theoretical plates of octane had a 46% increase and reached up to 14458 plates. Meanwhile, the peak area of nonane was increased by 349.8%.

CAS / MDL: 78-10-4 70131-67-8
研究领域: 分析化学 · 材料科学 · 微纳制造
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CHINESE JOURNAL OF ANALYTICAL CHEMISTRY · 2018 · IF 0.824

Study of Monolithic Integrated Micro Gas Chromatography Chip

Bo-Wen TIAN,Fei FENG,Bin ZHAO,Fan LUO,Xue-Lei YANG,Hai-Mei ZHOU,Xin-Xin LI

A monolithic micro gas chromatography (μGC) chip which integrated the micro separation column (μSC) and the micro thermal conductivity detector (μTCD) based on MEMS (Micro-electro-mechanical systems) technique was fabricated. Compared to the state of the art, the μSC with high depth-to-width ratio channels that was coated with mesoporous silica nanoparticles as stationary phase could effectively improve the column capacity and separation performance. Besides, the stable suspending μTCD, which was designed and fabricated in two ports of the μGC chip, could availably enhance the thermal isolation and reliability of the device. The mixture of light hydrocarbons (methane, ethane, propane and butane) could be separated from each other and detected by this monolithic integrated μGC chip, in which the overall analysis and detection time was only 33 seconds, the separation resolution of ethane and propane was 8.34, and the number of theoretical plate was as high as 11420. The monolithic integrated μGC chip has many advantages such as good separation resolution, high column efficiency and short analysis time, and is suitable for portable gas chromatographic field and onsite detection.

研究领域: 分析化学 · 微机电系统
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MICROCHIMICA ACTA · 2016 ·Vol. 183 ·期 3 ·1107-1114 · IF 4.831

Giant magneto-resistance based immunoassay for the tumor marker carcinoembryonic antigen

Sun Xue-cheng,Lei Chong,Guo Lei,Zhou Yong

We report on a giant magnetoresistance (GMR) based immunosensor for the carcinoembryonic antigen (CEA) labeled with superparamagnetic microparticles (Dynabeads). The GMR sensor contains 200 GMR strips and was fabricated by micro-electromechanical system (MEMS) technology. This system can detect Dynabeads in concentrations down to 10 ng⋅mL −1 . Sandwich immunoassays were employed on the surface of a gold film modified with a self-assembled monolayer and using biotinylated secondary antibody against CEA and streptavidinylated Dynabeads. With DC magnetic fields in the range of 40 to 90 Oe, CEA can be detected with a detection limit as low as 10 pg⋅mL −1 . Samples spiked with different concentrations of CEA can be distinguished clearly, and the method is deemed to be well suited for clinical use. Make use of antigen-antibody immune reaction, Dynabeads that conjugated with polyclonal CEA antibodies were captured onto the surface of Au film which immobilize of monoclonal CEA antibodies. Under the dc magnetic field magnetizing, the superparamagnetism Dynabeads induced a weak magnetic field that can be detected by the nearby GMR sensor, which reveals the presence of CEA. GMR: giant magneto-resistance CEA: carcinoembryonic antigens.

CAS / MDL: 25952-53-8 71310-21-9
研究领域: 生物传感器 · 生物医学工程 · 分子诊断 · 癌症研究
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ANALYTICAL CHEMISTRY · 2021 · IF 6.986

Integrating Highly Porous and Flexible Au Hydrogels with Soft-MEMS Technologies for High-Performance Wearable Biosensing

Guanglei Li,Jia Hao,Wenli Li,Fangyuan Ma,Tuotuo Ma,Wei Gao,Yiting Yu,Dan Wen

Wearable biosensors for real-time and non-invasive detection of biomarkers are of importance in early diagnosis and treatment of diseases. Herein, a high-performance wearable biosensing platform was proposed by combining a three-dimensional hierarchical porous Au hydrogel-enzyme electrode with high biocompatibility, activity, and flexibility and soft-MEMS technologies with high precision and capability of mass production. Using glucose oxidase as the model enzyme, the glucose sensor exhibits a sensitivity of 10.51 μA mM–1 cm–2, a long durability over 15 days, and a good selectivity. Under the mechanical deformation (0 to 90°), it is able to maintain an almost constant performance with a low deviation of <1.84%. With the assistance of a wireless or a Bluetooth module, this wearable sensing platform achieves real-time and non-invasive glucose monitoring on human skins. Similarly, continuous lactic acid monitoring was also realized with lactate oxidase immobilized on the same sensing platform, further verifying the universality of this sensing platform. Therefore, our work holds promise to provide a universal, high-performance wearable biosensing platform for various biomarkers in sweat and reliable diagnostic information for health management.

研究领域: 生物传感器 · 材料科学 · 可穿戴技术 · 生物医学工程
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