双(甲基-η⁵-环戊二烯基)甲氧基甲基锆

货号: B475957
有货
级别和纯度: 包装用于沉积系统
储存条件
室温
★
规格
库存
价格
数量
10g
B475957-10g
期货 Stock Image
¥8,080.90
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概述

Description

Atomic number of base material: 40 ZirconiumAdvanced precursor for atomic layer deposition of ZrO2thin films. Hafnium and zirconium oxides are leading candidates to replace silicion dioxide as the gate oxide in a variety of semiconductor and energy applications. Excellent properties of HfO2and ZrO2films make them especially attractive for gate oxide replacement and as potential insulating dielectrics for capacitive elements in memory devices such as DRAM.Precursors Packaged for Depositions Systems

Description

Atomic number of base material: 40 ZirconiumAdvanced precursor for atomic layer deposition of ZrO2thin films. Hafnium and zirconium oxides are leading candidates to replace silicion dioxide as the gate oxide in a variety of semiconductor and energy applications. Excellent properties of HfO2and ZrO2films make them especially attractive for gate oxide replacement and as potential insulating dielectrics for capacitive elements in memory devices such as DRAM.Precursors Packaged for Depositions Systems

规格

英文别名
ZrD-CO₄, ZRCMMM
规格或纯度
包装用于沉积系统
英文名称
Bis(methyl-η⁵−cyclopentadienyl)methoxymethylzirconium
储存条件
室温
名称和识别符
分子类型
小分子

高级数据

化学和物理性质
密度
1.27g/mL±0.01g/mL at 25°C (lit.)
安全和危险性(GHS)
信号词
警告
危险声明

H302: 吞食有害

H315: 引起皮肤刺激

H319: 引起严重眼睛刺激

预防措施声明

P305+P351+P338: 如进入眼睛:用水小心冲洗几分钟。如戴隐形眼镜并可方便地取出,取出隐形眼镜。继续冲洗。

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