摘要
Better electrical insulation and thermal management are both urgently required in integrated power semiconductors. Electrical insulation epoxy encapsulation suffers from poor heat conduction, which has increasingly become a bottleneck of power semiconductors integration. Although incorporating high thermal conductivity ceramics, such as hexagonal boron nitride (hBN), aluminium nitride etc. into epoxy promotes the thermal conductivity, the eco-friendly scalable fabrication of these composites with sufficient electrical breakdown strength remains a formidable challenge. Suitable voltage stabilizers are known to provide additional benefits to breakdown strength. Herein, a high-throughput approach combining plasma with roll-to-roll was developed. The voltage stabilizer (acetophenone) was grafted on interfaces between hBN and epoxy matrix through plasma. The high-energy electrons are consumed by the grafted interface, which leads to the significant suppression of partial discharge in Epoxy/hBN. Meanwhile, interfacial phonon scattering is repaired by grafting. Therefore, the epoxy composite concurrently exhibits improved breakdown strength (by 27.4%) and thermal conductivity (by 142.9%) at about 11.9 wt.% filler content, outperforming the pure epoxy. Consequently, a promising modification strategy for mass production is provided for the encapsulation materials in various high-power-density semiconductor devices.
危险品化学品经营许可证(带存储)