Full Activation of Dopants by Carbon-free Self-Assembled Molecular Monolayer Doping

Self-assembled molecular monolayer doping may find important applications in doping FinFET and nanowire transistors due to its nature of being conformal, nondestructive, and self-limiting. However, carbon contamination from the dopant carrier molecules is often introduced into silicon, which will affect the device performance. Herein, we use carbon-free phosphorus chloride (PCl3) molecules as dopant carrier molecules to avoid the introduction of carbon contamination. The Hall effect measurements and secondary ion mass spectrometry show that the dopant activation rate is close to full activation even for samples with a low doping concentration.