Effects of embedded SiO2 nanoparticles on the moisture barrier performance of inorganic/organic laminates

Thin-film encapsulation (TFE) is essential and challenging for flexible organic/quantum dot light-emitting diodes (OLEDs/QLEDs). In this work, SiO 2 nanoparticles were added into the NEA 121 polymer (s-NEA) to prolong the permeation pathways, showing good barrier property and high optical transparency. With increasing the concentration of SiO 2 nanoparticles up to 20 mg/ml, the value of water vapor transmission rate (WVTR) decreased. A single s-NEA layer with silica concentration of 20 mg/ml and thickness of ~ 75 µm exhibited WVTR of 2.5 × 10 −3  g/m 2 /day and light transmittance of above 80%. Al 2 O 3 thin films fabricated using atomic layer deposition were inserted between s-NEA layers to form dyad-style Al 2 O 3 /s-NEA multilayers. The Al 2 O 3 (60 nm)/s-NEA (20 µm) multilayers with 3 units exhibited WVTR of 2.6 × 10 −5  g/m 2 /day and consistently demonstrated a significantly extended QLED lifetime.