Synthesis and characterization of organo-soluble and photosensitive benzocyclobutene-terminated imides

Three kinds of benzocyclobutene (BCB)-terminated imide monomers have been synthesized by the imidization and Heck reaction. The obtained BCB monomers exhibit good solubility in a wide range of organic solvents at room temperature. The BCB monomers show an exothermal curing behavior in the range of 220–270   °C. The curing kinetic parameters, the apparent activation energy ( E a ), the frequency factor ( A ) and the reaction order ( n ), are obtained by non-isothermal DSC method. The cured BCB resins exhibit good thermal stability ( T d 5   >   435   °C), high glass transition temperature ( T g   >   300   °C) and low dielectric constant. Moreover, high quality negative patterns of the BCB films are obtained after the photolithography.