Screen Printing Silver Shielded ITO–In2O3 Thin-Film Thermocouples for Electromagnetic Interference Reduction

Thin-film thermocouples (TFTC) have been extensively studied for their wide range of applications in various environments. However, TFTC faces challenges in electromagnetic environments as they can generate AC interference voltage. In this study, we introduce a thermocouple temperature sensor shielded by silver (Ag) thin film on both sides of aluminum oxide (Al ₂ O ₃ ) substrate. The high conductivity of Ag film (11.48 mΩ/□) helps reduce interference caused by alternating current, resulting in a superior electromagnetic shielding effectiveness of 43.68 dB. The temperature sensitivity coefficient of this sensor is 20.87 $\mu$ V/°C at a hot end temperature of 318.44 °C. These shielded TFTC temperature sensors show great potential for applications in aerospace, iron and steel metallurgy, and other industries.