Ultrathin GaN Film Derived from Amorphous Ga2O3 Film

It remains a big challenge to synthesize two-dimensional (2D) GaN material for applications in power nanodevices. Traditional synthetic methods require complex equipment and processes and time consuming. Here, we reported a two-step route to prepare polycrystalline 2D GaN film. The amorphous ultrathin Ga 2 O 3 film was first exfoliated from the surface of liquid gallium. In a vapor phase reaction, 2D Ga 2 O 3 film was then converted into 2D GaN film while maintaining the 2D morphology. Raman and high-resolution transmission electron microscope (HRTEM) analysis implies the successful synthesis of wurtzite-type GaN ultrathin film. This simple strategy proposed in this work will provide more opportunities for applications of GaN ultrathin film in many devices.