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Wet Etching-Based WO3 Patterning for High-Performance Neuromorphic Electrochemical Transistors

Journal 2025 · IF 2.6 · 14(6): 1183 · 发表于 2025 年 3 月 18 日
作者: Liwei Zhang,Sixing Chen,Shaoming Fu,Songjia Han,Li Zhang,Yu Zhang,Mengye Wang,Chuan Liu,Xiaoci Liang
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摘要

WO3-based electrochemical transistors (ECTs) are recognized as candidates for three-terminal memristors due to their high on–off ratio, long retention time, and rapid switching speed. However, their patterned fabrication often relies on complex vacuum systems or extreme processing conditions, hindering cost-effective scalability. Here, we developed a novel wet etching technique integrated with sol–gel-derived WO3channels, enabling ambient-air fabrication of Nafion-WO3ECTs. The wet-etched devices achieve an on–off ratio of ~105, surpassing unetched and dry-etched counterparts by orders of magnitude. Furthermore, they exhibit exceptional paired-pulse facilitation and long-term stability, maintaining 12 distinct conductance states for 103s, and an on–off ratio of ~102over 25 read–write cycles. XPS result shows higher W5+content and M-O-H bond proportion for wet-etched devices, revealing an optimized interface, with enhanced H+injection efficiency. The simulated artificial neural network using this wet-etched ECT shows ~97% recognition accuracy for handwritten numerals. This approach offers a novel patterning strategy for developing cost-effective, high-performance neuromorphic devices.

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