摘要
Flexible pressure sensors have wide range of applications in fields such as electronic skin, medical detection and wearable devices. In this paper, a flexible piezoresistive pressure sensor based on Cu mesh/ZnO nanorod/graphene pressure-active layer is designed. Cu mesh is used as the conductive substrate, which not only enhances sensor performance but also expands the detection range of the sensor with its interlaced grid structure. To enhance the stability of the sensor, the graphene-functionalized polyvinylidene fluoride (PVDF) film is inserted between this active layer and the bottom electrodes, which prevents the direct contact between the Cu mesh and the electrodes, increases the electron transport channel and enhances the responsiveness of the sensor. The sensor shows sensitivity of 0.4 kPa -1 over pressure range of 0-0.5 kPa, as well as response time of 413 ms. Based on the excellent characteristics, a 4×4 pressure sensor array is constructed for the application of pressure sensors in daily life and human activity detection, which enables high-resolution detection and provides a reliable idea for the design of flexible sensors in the future.
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