摘要
Tetramethylsilane (TMS) plays the crucial role in high-quality silicon carbide films, semiconductors, and low dielectric materials. However, the production of high pure TMS needs to remove isopentane, a byproduct with a nearly boiling point from TMS, consuming a large amount of energy in traditional distillation processes. Herein, a series of ultramicroporous MOFs, [M 3 (HCOO) 6 ] (M = Co, Mg, Ni), featuring the synergy of nano-traps and molecular sieving effect, is synthesized to achieve efficient separation of TMS/isopentane. Co 3 (HCOO) 6 exhibits distinct adsorption preferences among these MOFs, showing high isopentane uptake (2.72 mmol·g −1 ) but limited TMS adsorption (0.33 mmol·g −1 ) at 308 K and 60 kPa. Remarkably, it achieves a high-purity TMS (>99.999 %) productivity of 0.348 kg·kg −1 , demonstrating both exceptional adsorption capacity and unprecedented TMS/isopentane selectivity. Co 3 (HCOO) 6 is further processed into pellets using polyether sulfone (PES) as a binder. Remarkably, Co 3 (HCOO) 6 @5%PES retains a high isopentane uptake of 2.59 mmol·g −1 , while maintaining a high-purity TMS (99.9993 %) productivity of 0.279 kg·kg −1 . The result demonstrates that the separation efficiencies remain comparable to powder, highlighting the promising prospects of composite adsorbents for practical applications
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