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Near-zero τf values in BaY2Si3O10-Ba5Si8O21 multi-phase ceramics with excellent compatibility for LTCC technology

Journal 2025 · IF 5.6 · 51(30): 65060-65066 · 发表于 2025 年 11 月 5 日
作者: Hui Yan,Yue Ma,Yong Shang,Yun Wang,Kaixin Song,Guoda Xie,Bo Wu,Xingang Ren,Xianliang Wu,Gang Wang
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摘要

A series of novel low-permittivity microwave dielectric ceramics with the compositions of (1- x ) BaY 2 Si 3 O 10 - x Ba 5 Si 8 O 21 (0.3 ≤  x  ≤ 0.7) and 0.4 BaY 2 Si 3 O 10 -0.6 Ba 5 Si 8 O 21 - y wt% LiF (1 ≤  y  ≤ 3) were successfully synthesized using solid-state reaction sintering. The phase evolution and microwave dielectric properties of these ceramics were systematically studied. X-ray diffraction analysis indicated the coexistence of BaY 2 Si 3 O 10 and Ba 5 Si 8 O 21 phases in the (1- x ) BaY 2 Si 3 O 10 - x Ba 5 Si 8 O 21 system, with no secondary phases detected. In contrast, an additional Ba 2 Si 3 O 8 phase was identified in the LiF-modified composition (0.4 BaY 2 Si 3 O 10 -0.6 Ba 5 Si 8 O 21 - y wt% LiF (1 ≤  y  ≤ 3)). Moreover, the Ba 5 Si 8 O 21 phase was found to effectively tune the temperature coefficient of resonant frequency (τ f ) to near-zero values in both systems. Excellent microwave dielectric properties were obtained for the 0.4 BaY 2 Si 3 O 10 -0.6 Ba 5 Si 8 O 21 - 2 wt% LiF ceramic, exhibiting a permittivity ( ε r ) of 7.45, a quality factor ( Q  ×  f ) of 13,152 GHz, and a τ f value of −3.17 ppm/°C. This composition also showed good chemical compatibility with silver electrodes, suggesting its potential for use in low-temperature co-fired ceramic (LTCC) applications.

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