An Amidinato-Cerium Compound and Its Application as CVD Precursor for CeOx-Based Materials

Abstract A cerium compound with asymmetric amidinate ligands [Ce( i PrNC(Me)N t Bu) 3 ] has been reported and characterized in this paper. The compound showed good volatility and thermal stability, which were evaluated by TGA (thermogravimetric analysis). Corresponding results indicated the great potential of this compound for the chemical vapor deposition (CVD) process. Therefore, CeO x film and particle (loaded on TiO 2 ) deposition were conducted by CVD using Ce( i PrNC(Me)N t Bu) 3 and O 2 as precursors. Meanwhile, the photocatalytic activity of the CVD CeO x –TiO 2 composite was evaluated by degrading methylene blue solution under the irradiation of ultraviolet light (365 nm).