A nickel(II) guanidinate compound and its potential as CVD precursor for nickel related films

In this study, a nickel(II) compound with guanidinate ligand of the general form [((Me) 2 NC( i PrN) 2 ) 2 Ni] has been synthesized and isolated from the reaction of NiCl 2 with the corresponding lithium salt of guanidinate ligand [(Me) 2 NC( i PrN) 2 Li] at 70 °C. Its structure was determined by 1 H NMR, elemental analysis, and single crystal X-ray diffraction. Thermogravimetric analysis (TGA) was employed to study the thermal properties (including thermal stability, volatility, vapor pressure and transport behavior) of compound. Furthermore, a deposition experiment was made to examine the compound’s potential as CVD precursor, and a Ni metal film was successfully deposited. These preliminary results illustrate the potential of this compound to act as CVD precursor.