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Patternable Quantum-Dot Photoresist with High Photolithographic Uniformity

Journal 2021 · IF 1.474 · 13(4): 624-631 · 发表于 2021 年 4 月 1 日
作者: Lin Jianyao,Chen Yu,Ye Yun,Xu Sheng,Guo Tailiang,Chen Enguo
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摘要

We present a ligand-exchange-free photo-patternable quantum-dot photoresist (QDPR) with high photolithographic uniformity. The dispersion mechanism between the QD’s surface ligands and the functional groups of photoresist polymers are studied. Results show that the dispersibility and photoluminescent intensity of this QDPR can be both improved by controlling dispersant and antioxidant. For device demonstration, multi-colored quantum dot color conversion films (QDCCF) were prepared and patterned by a photolithography process. High QD dispersibility and film-forming uniformity were both achieved with this QDCCF. It is believed that the proposed QDPR has the potential to be extensively used in lighting or display applications.