Synthesis of environment-friendly and label-free SERS probe for Iron(III) detection in integrated circuit cleaning solution waste

In this work, an environment-friendly and label-free SERS probe was synthesized through Tollens' reagent and phytic acid to detect Fe 3+ ions in the integrated circuit cleaning solution waste. The synthesis process was greatly shortened to 30 min compared with the traditional synthesis time of 6 h. In addition, this SERS probe can be directly used and avoid the environmental pollution caused by the further modification in the synthesis process. This probe has a high sensitivity (LOD = 0.1 μmol L −1 ) and a wide detection range from 0.5 μmol L −1 to 500 μmol L −1 .As a practical application, it has been successfully applied to detect Fe 3+ ions in the standard clean two solution (SC-2). This method provides a feasible detection way for whether integrated circuit cleaning solution waste meets the emission criteria.