Patterning of MgO epitaxial films on LaAlO3 substrate using photosensitive sol-gel method

Herein, the chelated precursor solution (Mg/BzAc) was synthesized using magnesium acetate as raw material and benzoylacetone as chemical modifier. The prepared solution was coated on (00  l )-oriented LaAlO 3 (LAO) single crystal substrate to fabricate the MgO/BzAc gel films. First, ultraviolet absorption spectroscopy was employed to analyze the ultraviolet photosensitivity of the MgO/BzAc gel films and the characteristic absorption peak corresponding to π-π* transition in Mg/BzAc chelate rings was detected at the wavelength of 329 nm. It is found that the intensity of this peak decreased gradually with increase in UV irradiation time, which indicates that the MgO/BzAc gel films exhibit good ultraviolet photosensitive properties. Then, MgO crystalline films with biaxial texture were prepared by heat-treating MgO/BzAc gel films at 850 °C in air for 60 min. Finally, micro-patterned MgO films with biaxial textures were prepared on the LAO substrate using photosensitive sol-gel lithography in combination with the above heat-treatment process.