Study on preparation of LSTP thin film electrolyte by RF magnetron sputtering and electrical properties

Amorphous Li–Si–Ti–P–O (LSTP) thin film electrolyte was successfully prepared by radio frequency magnetron sputtering using Li 1.4 Si 0.4 Ti 1.6 (PO 4 ) 3 powder targets and stainless steel sheet as substrate. The effects of sputtering power on the structure, morphology, ionic conductivity, and electronic conductivity of the LSTP thin film electrolyte were investigated. The results showed that the LSTP thin film electrolyte obtained with sputtering power kept at 160 W, displayed uniform particles compacted in arrangement, proper stoichiometric ratio to the powder target as well as sufficient Li-ion for diffusion. Hence, it held a considerable ionic conductivity of 4.12 × 10 −6 S cm −1 and a high σ ion / σ ele ratio about 8 magnitudes, indicating that it can be used as film electrolyte in all-solid-state lithium batteries.