Effect of sputtering pressure on the superconducting properties of Fe(Te,Se) films

Fe(Te,Se) is a simple, iron-based compound that is conducive to the study of superconductivity mechanisms and has potential for large-scale applications. At present, Fe(Te,Se) thin films are primarily prepared using the pulsed laser deposition method. Herein, FeTe 0.6 Se 0.4 films were grown by magnetron sputtering on CaF 2 substrates. The effect of sputtering pressure on the superconductivity of the film was investigated. Excessive pressure caused a higher iron content, which affected the superconductivity and prevented it from completely reaching a zero-resistance state. Δ T c was smaller for the film grown under 0.2 Pa, and its upper critical field reached 144.35 T, which indicates its greater application potential. Our results illustrated that sputtering pressure was a critical process parameter, which provided an important reference for future research to fabricate commercial iron-based superconducting tapes by magnetron sputtering.