摘要
BiFe 0.93 Mn 0.07 O 3 -0.82BiFe 0.975 Ti 0.025 O 3 -0.18CaTiO 3 thin films were prepared on Pt/Si substrate by chemical solution deposition. The microstructure, ferroelectric and piezoelectric properties of the composite films under different annealing temperature were studied systematically. The thin film annealed at 500 °C possesses the maximum remanent polarization and piezoelectric coefficient of 112.6 µC/cm 2 and 878.2 pm/V, respectively, which is comparable to most of BiFeO 3 -based orientated films. The results can be ascribed to the dense and uniform grain distribution in the surface morphology, and coexistence of rhombohedral twisted perovskite symmetrical structure ( R3c space group) and pseudo-cubic structural phase. This work provides a feasible way to prepare high-quality lead-free composite ferroelectric films at low-cost.
危险品化学品经营许可证（带存储）