ACS Applied Materials & Interfaces
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2024
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IF 8.3
Wenjun Yan,Yun Liu,Yan Bai,Yulong Chen,Houpan Zhou,Waqar Ahmad
In this paper, we present the design and evaluation of an intelligent MEMS sensor employing the oxidized medium-entropy alloy (O-MEA) of FeCoNi as the gas-sensing material. Due to the specific catalytic exothermic reaction of the O-MEA on H2/CO, the sensor shows great selectivity for H2 and CO at 150 °C of the integrated microheater in the MEMS device, with the theoretical detection limit of 0.3 ppm for H2 and 0.29 ppm for CO. The MEMS heater, capable of instantaneous temperature changes in pulse operation mode, offers a novel approach for thermal modulation of the sensor, which is crucial for the adsorption and reaction of H2/CO molecules on the sensing layer surface. Consequently, we investigate the gas-sensing capabilities of the sensor under pulse heating modes (PHMs) of the MEMS heater and then propose the gas-sensing mechanism. The results indicate that PHMs significantly not only reduce the operating temperature and power consumption but also enhance the sensor’s functionality by providing multivariable response signals, paving the way for intelligent gas detection. Based on the high selectivity to H2 and CO, transforming the transient sensing curves into two-dimensional images via Gramian Angular Field (GAF) model and subsequent modeling using a convolutional neural network (CNN) algorithm, we have realized efficient and intelligent recognition of H2 and CO. This work provides insight for the development of low-power, high-performance MEMS gas sensors and further intelligence of individual MEMS sensors.
研究领域:
材料科学
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传感器技术
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人工智能
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产品关联
DOI
PubMed
高影响因子
ACS Sensors
·
2021
·
IF 7.711
Wenjun Yan,Huoshu Xu,Min Ling,Shiyu Zhou,Tong Qiu,Yanjun Deng,Zhidong Zhao,Erpan Zhang
Trimethylamine (TMA) sensors based on metal oxide semiconductors (MOS) have drawn great attention for real-time seafood quality evaluation. However, poor selectivity and baseline drift limit the practical applications of MOS TMA sensors. Engineering core@shell heterojunction structures with accumulation and depletion layers formed at the interface is regarded as an appealing way for enhanced gas sensing performances. Herein, we design porous hollow Co3O4@ZnO cages via a facile ZIF-67@ZIF-8-derived approach for TMA sensors. These sensors demonstrate great TMA resistive sensing performance (linear response at moderate TMA concentrations (<33 ppm)), and a high sensitivity of ∼41 is observed when exposed to 33 ppm TMA, with a response/recovery time of only 3/2 s. This superior performance benefits from the Co3O4@ZnO porous hollow structure with maximum heterojunctions and high surface area. Furthermore, great capacitive TMA sensing with linear sensitivity over the full testing concentration range (0.33–66 ppm) and better baseline stability were investigated. A possible capacitive sensing mechanism of TMA polarization was proposed. For practical usage, a portable sensing prototype based on the Co3O4@ZnO sensor was fabricated, and its satisfactory sensing behavior further confirms the potential for real-time TMA detection.
研究领域:
材料科学
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纳米技术
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传感器技术
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化学工程
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产品关联
DOI
PubMed
高影响因子
ACS Applied Nano Materials
·
2023
·
IF 5.9
Shuang Wang,Li Yang,Zhenzhan Yan,Jimin Han,Wenchao Tong
The main bottleneck preventing powders from being used in a microinitiation system is the paradox between safety and detonation performance, as well as powders’ inherent brittleness and difficulty in shaping. To address this problem, we used the coaxial electrospinning technology to design and fabricate a core–shell film (CA@C–D) with low sensitivity and high energy. Electrostatic sensitivity (E50 = 5.22 mJ) and flame sensitivity (H50 = 51 cm) are both significantly lower than those of the raw copper azide (CA) material and can detonate secondary explosives. Extensive characterization and experiments show that the unusual core–shell structure of coaxial electrostatic spinning fibers is responsible for this significant improvement. This high specific surface area carbon shell wraps around the CA particles, providing double protection, while the superior thermal and electrical conductivity of the carbon material helps improve system safety and maintains the azide output performance. More importantly, it always maintains a good film structure and is simple to process, meeting the actual requirements of MEMS initiators and introducing a new scheme for the preparation of film-based initiators.
研究领域:
材料科学
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纳米技术
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电纺技术
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微机电系统(MEMS)
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炸药工程
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产品关联
DOI
高影响因子
ANALYTICAL CHEMISTRY
·
2021
·
IF 6.986
Guanglei Li,Jia Hao,Wenli Li,Fangyuan Ma,Tuotuo Ma,Wei Gao,Yiting Yu,Dan Wen
Wearable biosensors for real-time and non-invasive detection of biomarkers are of importance in early diagnosis and treatment of diseases. Herein, a high-performance wearable biosensing platform was proposed by combining a three-dimensional hierarchical porous Au hydrogel-enzyme electrode with high biocompatibility, activity, and flexibility and soft-MEMS technologies with high precision and capability of mass production. Using glucose oxidase as the model enzyme, the glucose sensor exhibits a sensitivity of 10.51 μA mM–1 cm–2, a long durability over 15 days, and a good selectivity. Under the mechanical deformation (0 to 90°), it is able to maintain an almost constant performance with a low deviation of <1.84%. With the assistance of a wireless or a Bluetooth module, this wearable sensing platform achieves real-time and non-invasive glucose monitoring on human skins. Similarly, continuous lactic acid monitoring was also realized with lactate oxidase immobilized on the same sensing platform, further verifying the universality of this sensing platform. Therefore, our work holds promise to provide a universal, high-performance wearable biosensing platform for various biomarkers in sweat and reliable diagnostic information for health management.
研究领域:
生物传感器
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材料科学
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可穿戴技术
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生物医学工程
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产品关联
DOI
PubMed
高影响因子
ACS Applied Nano Materials
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2022
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IF 6.14
Lecheng Zhu,Qian Rong,Zheng Yang,Wei Zhang,Mingzhi Jiao,Jiming Song,Chunchang Wang,Youmin Guo
The development of microelectromechanical system (MEMS)-based sensors with ZnO nanoparticles as sensitive materials for detecting a low concentration of H2S has recently attracted extensive attention because of their small size and easy integration. In this study, undecorated ZnO nanoparticles were synthesized by a facile coprecipitation method with the regulation of ammonia water. The phase structure, nanostructure, specific area, surface basicity, and oxygen species of the synthesized ZnO nanoparticles were systematically investigated. Then, preferred ZnO-1 nanoparticles were deposited on the MEMS microhotplate chips as a sensitive material, and the corresponding gas-sensing performances were characterized for various gases at an optimal operating temperature of 220 °C. The MEMS-based sensors with ZnO-1 showed good sensitivity to 1 ppm H2S at 220 °C with response/recovery times of 72 and 29 s, respectively. Furthermore, the sensor presented a wide linear range from 50 ppb to 15 ppm, good repeatability, and high selectivity. Such enhanced sensing performance to H2S was mainly attributed to the large surface area and the high surface basicity of prepared ZnO-1 nanoparticles. Moreover, a plausible reason for the enhanced sensing performance was also proposed.
研究领域:
材料科学
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传感器技术
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环境监测
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产品关联
DOI
高影响因子
Electronics
·
2025
·Vol. 14
·期 5
·1050
·
IF 2.6
Xiang Gao,Ying Chen,Pengcheng Xu,Dan Zheng,Xinxin Li
The selective detection of propane gas molecules using semiconductor gas sensors has always been a challenge within research. In this study, we successfully synthesized a γ-Fe2O3nanomaterial with a selective catalytic effect on propane and loaded it onto a ZnO sensing material to construct a double-layer microsensor, which showed good sensing response characteristics in the detection of the refrigerant R290 (which is mainly propane). In addition, we also prepared a series of iron oxides, including nanomaterials such as α-Fe2O3, Fe3O4, and FeO, as well as γ-Fe2O3materials with different specific surface areas obtained at various processing temperatures, and we carried out gas sensing research on R290. The results show that the γ-Fe2O3material has a better sensitivity to R290, and the γ-Fe2O3material calcined at 200 °C shows the best performance. Our results can provide a theoretical basis for the design and optimization of semiconductor gas sensors for alkane detection.
研究领域:
材料科学
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传感器技术
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产品关联
DOI
高影响因子
RSC Advances
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2014
·Vol. 4
·期 47
·24612-24618
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IF 3.708
Yangyang Li,Ben Q. Li
An optical-thermal experimental system, in which CdTe quantum dots (QDs) were used as thermal sensors, is developed for micro-electromechanical system (MEMS) temperature measurements in the high temperature range (>70 °C). Laboratory-prepared CdTe QDs with suitably controlled synthesis conditions show excellent temperature sensitivity. For orange emitting CdTe QDs, calibration from a type A micro-heater yields a linear relation between the spectral peak shift and the temperature over the temperature range of 27 °C to 170 °C, the last being the highest temperature of the heater achieved in our current optical-thermal experimental setup. This linear relation is consistent with the predictions for semiconductor quantum systems from the principle of thermo-quantum mechanics for the temperature above the Debye point. Analysis of the experimental data indicates that the orange emitting QDs possess a thermally-induced spectral-shift sensitivity of 0.34 nm °C−1, which is approximately about 2–3 times better than reported. The excellent repeatability and accuracy of the calibrated orange emitting CdTe QDs as thermal sensors are further demonstrated by applying them in monitoring electric thermal characteristics of type B MEMS structures. While calibration is for up to 170 °C, the temperature of up to 212 °C for the type B MEMS heater was measured with a satisfactory accuracy using the CdTe QDs, further demonstrating the stability of the thermal-spectral properties of the QDs. The existence of a unique “burnout” spectrum in the temperature dependent PL spectra also suggests that optical-thermally sensitive QDs can be applied in both monitoring the temperature development and diagnosing circuit breakout due to over-heating.
研究领域:
材料科学
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光学工程
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纳米技术
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产品关联
DOI
高影响因子
MICROCHEMICAL JOURNAL
·
2026
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IF 5.1
Hexin Wang,Yangjun Mao,Xiaohong Tao,Jiawen Hong,Jiesai Ma,Wenfeng Shen,Lianbang Wang,Junhua Zhao
Ethanol metabolism is a pivotal secondary metabolic process in post-harvest fruit storage, serving as a key indicator of freshness. However, the complex mixture of gases (e.g., CO 2 , aldehydes, esters, and alcohols) released during fruit ripening necessitates sensors with high selectivity and sensitivity specifically toward ethanol. This study presents a high-performance micro-electro-mechanical system (MEMS) ethanol sensor based on WO 3 -RuO 2 nanomaterials synthesized via a simple and low-cost solvothermal method. The optimized sensor with a Ru mass ratio of 1 wt% operates at a low voltage of 1.5 V (200 °C) with a power consumption of only 25 mW. It exhibits a high response of 53.3 toward 100 ppm ethanol, approximately seven times greater than that of a pure WO 3 sensor, along with a low detection limit of 50 ppb. Notably, the sensor demonstrates excellent selectivity against common fruit-emitted interferents (e.g., ethyl acetate and CO 2 ) as well as other alcohols and structurally similar gases. The sensing mechanism was investigated through multiple complementary techniques, including in situ Raman spectroscopy, Mott-Schottky measurements, UV–Vis DRS, and UPS. Furthermore, an artificial neural network (ANN) model, validated by confusion matrices, successfully classified the freshness of mango and peach, confirming the sensor's practical capability for daily spoilage assessment and prediction.
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产品关联
DOI
高影响因子
Analysis & Sensing
·
2024
·
IF 3.4
Yifeng Xu,Haixia Mei,Yu Bing,Fuyun Zhang,Ning Sui,Tingting Zhou,Xiaopeng Fan,Lijie Wang,Tong Zhang
Graphical In this article, a Sm−Pd bimetal doped SnO 2 -based MEMS C 2 H 2 sensor was prepared for detecting dissolved acetylene gas in transformer oil. It has the unique advantages of high sensitivity, high selectivity and low power consumption. Acetylene (C 2 H 2 ), as an important characteristic gas in transformer fault diagnosis, should be accurately detected and effectively distinguished from other dissolved gases (H 2 , CH 4 , C 2 H 6 , C 2 H 4 , CO, CO 2 ), which is crucial to determine whether the fault occurs and the fault type, but also faces challenges now. The rational design and employment of rare earth and noble metals are expected to address this issue. In this work, SnO 2 -3 at% Sm 2 O 3 -1 at% PdO based MEMS gas sensor was prepared to achieve high performance detection of C 2 H 2 which has a response value of 56 to 50 ppm C 2 H 2 , response/recovery time of 2 s/136 s, lower detection limit of 1 ppm, power consumption of 15.5 mW, and weak cross sensitivity to other transformer fault characteristic gases. Lewis acids and bases theory was used to explain the reason why rare earth Sm is a benefit element to improve selectivity to C 2 H 2 . The formation of oxygen vacancies and hetero junctions was used to explain the increased sensitivity of the material. This study proved the feasibility of rare earth and noble metals as potential additives to enable advanced gas-sensitive materials for highly selective transformer fault characteristic gas C 2 H 2 detection.
研究领域:
材料科学
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传感器技术
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电力设备监测
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产品关联
DOI
高影响因子
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
·
2026
·
IF 3.5
Haoran He,Wanli Ma,Zhiqiang Fan,Kai Xu,Zhiqiang Kang,Wei Zhao,Le Zhang,Xiaojun Qiao,Wenping Geng
With the advancement of micro-nano manufacturing technologies, microheaters have demonstrated significant application value in fields such as sensing, ignition, and self-destruction systems. This paper designs and fabricates a parallel necked Ni microbridge microheater based on microelectromechanical systems (MEMS), employing a Ti/Cu/Ni metal multilayer structure on a SiO2/Si/SiO2 substrate to achieve a compact, integrable device configuration. Finite element simulations revealed the temperature distribution and evolution patterns under different current conditions, which were subsequently validated experimentally. Test results demonstrated that the device rapidly heats up under constant current drive, reaching a maximum temperature exceeding 600°C at 1.8 A drive conditions, exhibiting excellent electrothermal response characteristics. Further integrated validation demonstrates that the proposed microheater structure can achieve stable and controllable triggering under system-level packaging conditions. Under a driving current of 3 A, the device completes the self-destruction process within 1 s, accompanied by pronounced current drop and voltage surge characteristics, indicating that the designed electrothermal structure can satisfy the ignition requirements of porous silicon energetic chips at the system level, thereby reflecting favorable structural compatibility and design rationality. [2025-0234]
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产品关联
DOI
PubMed
高影响因子
Advanced Materials Technologies
·
2025
·
IF 6.2
Mathankumar Ganesan,Jin Li,Tongheng Cheng,Fei Wang
Pyrochlore-based metal oxide nanocomposites offer an attractive pathway for developing next-generation gas sensors by exploiting interfacial charge transfer and band engineering. Here, we report for the first time the use of Ce 2 Sn 2 O 7 /TiO 2 nanocomposites for ultra-trace NH 3 detection at room temperature. The materials are synthesized via a facile hydrothermal route and systematically evaluated against common volatile organic compounds, including ethanol, acetone, methanol, n-butanol, isopropanol, and triethanolamine. The Ce 2 Sn 2 O 7 /TiO 2 heterojunction demonstrated outstanding selectivity toward NH 3 , with the optimized CeTi2 sensor delivering an ultrahigh response of 83.8% to 100 ppm, a rapid response time of 12 and 5 s, and an exceptionally low detection limit of 2 ppb under ambient conditions (25°C). At 100°C, the prepared CeTi2 sensor displays a gas sensing response of 82.1% towards 100 ppm of NH 3 . Beyond sensitivity, the device exhibited excellent repeatability and long-term stability, and ensured reliable operation under realistic environments. Mechanistic analysis revealed that the Ce 2 Sn 2 O 7 /TiO 2 interface induces strong surface band bending and remarkably accelerates charge transport and reversible adsorption–desorption dynamics. This work establishes Ce 2 Sn 2 O 7 /TiO 2 as a pioneering platform for ppt-level NH 3 detection, offering a powerful combination of selectivity, stability, and energy-efficient operation for environmental monitoring and industrial safety.
研究领域:
材料科学
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气体传感技术
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纳米材料
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环境监测
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微机电系统（MEMS）
✓ 已验证
产品关联
DOI
高影响因子
JOURNAL OF CHROMATOGRAPHY A
·
2021
·
IF 4.759
Boxin Chen,Fei Feng,Yangyang Zhao,Qiyong Liu,Bin Zhao,Lei Li,Haimei Zhou,Xinxin Li
Semi-packed columns are microfabricated gas chromatography columns which have a large surface area and high aspect ratio. In this paper, a new semi-packed column with high-density elliptic cylindrical posts (SC HECP) made by a micro-electro-mechanical system (MEMS) technique was reported. Compared to a semi-packed column with cylindrical posts (SC CP) under the same effective width, the surface area and aspect ratio of SC HECP were improved by 71.19% and 76.47%, respectively. To compare the performance of these two semi-packed columns, SC HECP and SC CP were fabricated. A 10-nm thick alumina film was deposited as the stationary phase by atomic layer deposition technique to ensure the uniformity and repeatability of the stationary-phase film. A contrast experiment was conducted, and the results showed that compared with SC CP, better separation performance was realized in SC HECP due to the increase in surface area and aspect ratio. The number of theoretical plates of nonane was increased by 541.84%, and the tailing factor was decreased by 54.31%.
研究领域:
分析化学
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微纳米技术
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色谱技术
✓ 已验证
DOI
高影响因子
危险品化学品经营许可证（带存储）