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Microsystems & Nanoengineering · 2024 ·Vol. 10 ·期 1 ·1-13 · IF 7.3

Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors

Li Min,Qin Guangzhao,Jia Chen,Zhang Danyu,Li Zhikang,Han Xiangguang,Xu Shusheng,Zhao Libo,Luo Guoxi,Liu Cunlang,Yang Ping,Lin Qijing

With the rapid development of various fields, including aerospace, industrial measurement and control, and medical monitoring, the need to quantify flow velocity measurements is increasing. It is difficult for traditional flow velocity sensors to fulfill accuracy requirements for velocity measurements due to their small ranges, susceptibility to environmental impacts, and instability. Herein, to optimize sensor performance, a flexible microelectromechanical system (MEMS) thermal flow sensor is proposed that combines the working principles of thermal loss and thermal temperature difference and utilizes a flexible cavity substrate made of a low-thermal-conductivity polyimide/SiO 2 (PI/SiO 2 ) composite porous film to broaden the measurement range and improve the sensitivity. The measurement results show that the maximum measurable flow velocity can reach 30 m/s with a resolution of 5.4 mm/s. The average sensitivities of the sensor are 59.49 mV/(m s −1 ) in the medium-to-low wind velocity range of 0–2 m/s and 467.31 mV/(m s −1 ) in the wind velocity range of 2–30 m/s. The sensor proposed in this work can enable new applications of flexible flow sensors and wearable devices.

研究领域: 微机电系统 · 传感器技术 · 材料科学
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Journal of Materials Chemistry A · 2024 · IF 10.7

Hydrogel from Chrome Shavings for a Highly Sensitive Capacitive Pressure Sensor

Hua Yuan,Manting Wang,Jiaqi Zhang,Jie Xin Wang,Yuan Le

Ionic capacitive pressure sensors (CPSs) with excellent performance are urgently desired in the field of flexible pressure sensors. To enhance the sensing performance of ionic CPSs, the surface microstructures and internal structures of sensing materials need to be rationally designed. In this work, a novel and simple strategy is explored to construct microstructured hydrogels based on chrome shavings. The hydrogel displays outstanding performance due to its stable surface synapses and abundant pore structures, which are attributed to the unique structural features and appropriate gelation transition of chrome shavings collagen fibers (CFs). The assembled biomass hydrogel sensor exhibits high sensitivities of 6.01 kPa-1 (0-0.9 kPa), 1.62 kPa-1 (0.9-3 kPa), and 1.22 kPa-1 (3-8.95 kPa). Glycol was introduced to overcome the drying problem of the hydrogel. This work offers a new approach to constructing high-performance and cost-effective pressure sensors.

研究领域: 材料科学 · 生物医学工程
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Advanced Materials Technologies · 2020 ·Vol. 5 ·期 7 ·2000248 · IF 5.969

Highly Stable Cross-Linked Cationic Polyacrylamide/Ti3C2Tx MXene Nanocomposites for Flexible Ammonia-Recognition Devices

Lianjia Zhao,Yiqiang Zheng,Kang Wang,Chao Lv,Wei Wei,Lili Wang,Wei Han

Although ammonia gas sensor research has been developed for a long time, room temperature flexible ammonia gas sensors with high sensitivity and selectivity are still hot research topics. 2D transition metal carbides and nitrides (MXenes) have combined their versatile surface chemistry and high metal conductivity to show their enormous sensing potential. Herein, developing a room temperature nanocomposite based on 2D MXenes materials and cationic polyacrylamide (CPAM) with high gas response and flexibility targeting the construction of high-performance ammonia sensors is focused on. Thanks to the hydrogen bond composition, ohmic contact with the interdigitated electrodes, and excellent mechanical properties, the CPAM/Ti 3 C 2 T x -based ammonia sensors exhibit high ammonia selectivity, faster response–recovery rate (12.7/14.6 s), excellent flexibility, and long-term mechanical stability at room temperature. The synthesis of the CPAM/Ti 3 C 2 T x nanocomposites offers a lasting inspiration for developing high-performance flexible gas sensors.

CAS / MDL: 7664-39-3
研究领域: 材料科学 · 化学传感器
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COMPOSITES PART A-APPLIED SCIENCE AND MANUFACTURING · 2021 · IF 7.664

Lotus root structure-inspired Ti3C2-MXene-Based flexible and wearable strain sensor with ultra-high sensitivity and wide sensing range

Lu Wu,Chang Xu,Mingshuai Fan,Ping Tang,Rui Zhang,Shuaitao Yang,Lujun Pan,Yuezhen Bin

Flexible sensors have wide-ranging application prospects in the field of human health motion monitoring. However, it is still a challenge to design and prepare strain sensors with both high sensitivity and wide operating range. Inspired by the fiber connection structure of lotus root, the carbon nanocoils (CNCs) with large aspect ratio (acting as the lotus root fibers) is used as a conductive bridge to connect the fragile Ti 3 C 2 -MXene nanosheet layers, significantly enhancing the sensing range of the sensor. Waterborne polyurethane (WPU) encapsulated strain sensor (Ti 3 C 2 /CNCs/WPU) can achieve GF values and sensing ranges of 474 and 220%, respectively. In addition, this sensor shows reliable responses at different frequencies and can withstand more than 1000 stretch-release cycles. More importantly, the composite strain sensor can accurately sense and monitor different limb movements and human body motion states, showing broad application prospects in real-time human health detection.

CAS / MDL: 9002-93-1
研究领域: 材料科学 · 生物医学工程 · 传感器技术
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SENSORS AND ACTUATORS A-PHYSICAL · 2022 · IF 4.291

High-sensitive ppb-level ammonia QCM sensor based on sulfur doped Ti3C2Tx MXene

Baohui Zhang,Zhiqiong Li,Chong Li,Min Li,Chen Fu,Ran Tao,Xian-hu Zha,Honglang Li,Jingting Luo

This paper demonstrates chemi-resistive type and QCM ammonia sensors based on Ti 3 C 2 T x MXene with surface engineering. The morphology and structure composition of Ti 3 C 2 T x MXene were completely tested by XRD, SEM, TEM and Raman. The ammonia sensing performance of Ti 3 C 2 T x MXene sensors at room temperature were systematically studied. The QCM sensors show better performance towards ammonia than chemi-resistor sensors. The Ti 3 C 2 T x -S QCM sensor possesses quite sensitivity (49 Hz@100 ppb), high response/recovery capability (33 s/58 s) and good selectivity . XPS was introduced for the surface element status for the potential ammonia adsorption mechanism. It can be mainly related to for lowest average potential for reaction of Ti-S and the additional absorption towards the product nitric oxides enhancing the frequency shift by absorption mass increasing. This work confirms that surface engineering of Ti 3 C 2 T x MXene to be effective method for enhancing gas sensing performance, and the sensor shows potential application for low concentration ammonia sensing.

研究领域: 材料科学 · 传感器技术
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CHEMICAL ENGINEERING JOURNAL · 2025 · IF 13.2

Dual-catalytic polymerization of high-performance PEDOT thermoelectric fabrics for self-powered sensing

Yifan Cui,Qin Chen,Wuwei Bao,Hao Yao,Zhenzhe Huang,Rui Ma,Miao Miao,Lizhi Sheng,Xinyang He

Flexible thermoelectric fabrics hold great promise for applications in smart wearable devices, particularly in areas such as self-powered sensing, energy harvesting, and human-machine interaction. However, with the rapid advancement of flexible electronics, higher standards are being set for the durability, integration, and multifunctionality of wearable electronics. Currently reported thermoelectric materials still struggle to meet these demanding requirements. In this study, a dual-catalytic polymerization strategy is proposed to fabricate PEDOT-based thermoelectric fabrics by synergizing enzymatic and chemical polymerization. Enzymatic polymerization contributes to forming dense conductive layers, while chemical polymerization enables rapid construction of a structural framework, resulting in PEDOT@Nylon fabrics with excellent electrical conductivity (90.91 S/m), good durability (stable performance after 3 h washing and 600 bending cycles), and stretchability. The thermoelectric fabric can serve as a self-powered temperature sensor for contact/non-contact hot-cold recognition and ambient temperature monitoring over a broad temperature range (ΔT ~ 40 K). Additionally, it functions as a strain sensor, capable of real-time and rapid monitoring of human motion signals by integrating a wireless transmission system (with a response time of ~0.16 s). This efficient (4 h) dual-catalytic polymerization strategy produces high-performance thermoelectric fabrics, promising for wearable devices, smart healthcare, human-computer interaction, and next-generation multifunctional fabrics.

研究领域: 材料科学 · 纳米技术 · 柔性电子学 · 生物医学工程 · 智能纺织品 · 传感器技术 · 能源材料 · 可穿戴医疗
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SENSORS AND ACTUATORS B-CHEMICAL · 2023 · IF 8.4

Expanding the range of trackable environmental pollutants for Nafion based fuel cell type gas sensor

Lingchu Huang,Weijia Li,Huaiyuan Sun,Jianyu Zhang,Bin Wang,Qi Lu,Tong Wang,Xishuang Liang,Fangmeng Liu,Peng Sun,Fengmin Liu,Geyu Lu

Expanding the application field of fuel cell type gas sensors is of great significance for achieving high sensitivity, real-time gas detection at room temperature. Here, we developed a fuel cell type NO 2 gas sensor based on MoS 2 nanosheet/Carbon fiber (CF) sensing electrode and Nafion proton conductor , enabling the fuel cell type sensor to detect NO 2 for the first time. The effect of MoS 2 loadings(10, 20, 40, 60 and 80 mg) on the sensors’ performance and the sensitizing mechanism are investigated, the sensor containing 40 mg MoS 2 exhibits the best performance, which can be attributed to the large number of active sites and efficient carrier transport properties of the corresponding electrode materials. At room temperature, the optimal sensor demonstrates a sensitivity of 45.6 nA/ppm to 1–50 ppm NO 2 and an ultra-low detection limit of 28.8 ppb, both the response and recovery time are less than 60 s. This work not only develops a highly sensitive, reversible and fast response NO 2 gas sensor, but also provides insights into sensing electrochemistry, material selection and catalyst/support materials, offering guidelines for future fuel cell type gas sensors to monitor a wider range of environmental pollutants.

研究领域: 材料科学 · 环境科学 · 电化学
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SENSORS AND ACTUATORS B-CHEMICAL · 2022 · IF 9.221

An ionic liquid-based ratio fluorescent sensor for real-time visual monitoring of trace Hg2+

Siying Che,Linlin Yin,Yao Fan,Qijia Shou,Chunsong Zhou,Haiyan Fu,Yuanbin She

As a brand probe material, functional ionic liquids (ILs) have already been successfully employed in the detections of many targets, however, few of them focused on the real-time visual monitoring of trace Hg 2+ , one of the most representative heavy metal ions . Herein, we report a novel ratio fluorescent sensor using facile mixture of [RDB] [P 66614 ] IL and 7-hydroxycoumarin (HDC) for the on-site monitoring of Hg 2+ ignoring background interferences. To utilize and enhance the affinity characteristics of rhodamine B for Hg 2+ , it was first covalently linked onto the anion of IL and further mixed with HDC to construct a novel ratio fluorescent sensor for the achievement of self-calibration. Furthermore, this novel sensor showed a rapid and obvious color rendering performance from light white to opera pink even towards trace mercury(Ⅱ) in the range of 0.1–50 nM and could be further used even in common real samples such as waste water , urine, human plasma et. al. Most importantly, the sensor could be assembled into a paper sensor for the on-site visual monitoring of trace Hg 2+ ranging from 10 to 400 nM only taking 2 s, which enable to meet requirements for mercury(Ⅱ) limitations of WHO (30 nM) and EPA (10 nM).

研究领域: 分析化学 · 环境科学 · 生物医学
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IEEE SENSORS JOURNAL · 2024 · IF 4.3

Signal-independent and Interference-resistant All-MXene Flexible Pressure-temperature Dual-mode Sensor

Yixin Lu,Jun Sun,Wenqing Xu,Xinpeng Di,Wenchao Zhao,Long Zhang,Gebo Pan

Flexible, skin-like sensors are capable of converting various external stimuli into measurable electrical signals, crucial for advancing human-computer interaction and wearable health monitoring devices. Previous research on flexible smart sensing elements has primarily targeted single sensing functions, leaving the quest for integrated sensors capable of monitoring multiple signals largely unmet. In this paper, a signal-independent and interference-resistant pressure-temperature dual-mode sensor was fabricated by using a synergistic approach of structure and material design. A temperature-sensitive layer with a high temperature coefficient was prepared by introducing MOF-MXene into PU, and the dual-mode sensor was subsequently obtained by assembling it with S-MXene/PVDF composite as the encapsulating material and the pressure sensing layer. Fabric electrodes have small longitudinal dimensions as well as favorable compressibility and are well suited for the preparation of the miniature integrated sensor. Remarkably, the sensor demonstrates independent high-performance detection of both temperature and pressure signals. In terms of temperature sensing, the device has an average sensitivity of -3.6 %·°C -1 and a resolution of 0.1 °C, which is better than most sensors based on thermally sensitive semiconductor materials. The sensor has excellent resistance to stress and pressure interference, which is promising for application in the detection of human physiological signals. While pressure sensing, the sensor has excellent overall performance, such as high sensitivity (1.02 kPa -1 ), skin-like rapid response time (40 ms), ultra-high cyclic stability (20,000 cycles). Benefiting from the smaller temperature coefficient of the dielectric composite material, the sensor is insensitive to temperature within the range of 20-50 °C.

研究领域: 材料科学 · 传感器技术 · 生物医学工程
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ACS Applied Materials & Interfaces · 2024 · IF 8.3

Room-Temperature, Flexible Formaldehyde Gas Sensors Using Titanium-Incorporated 1T/2H MoS2

Zhiwei Wang,Xiang Zhao,Fangzhen Hong,Hao Wang,Heng Lei,Zhiming Chou,Jiandong Zheng

The development of room-temperature (RT) formaldehyde sensors is significant for indoor air quality monitoring. In this contribution, titanium (Ti)-incorporated 1T/2H molybdenum disulfide (MoS2) phase heterostructures were prepared via a facile hydrothermal method. Compared with 1T/2H MoS2, the as-prepared 1T/2H Mo1–xTixS2 nanosheets showed a boosted RT formaldehyde sensing performance, which was attributed to the enhanced gas adsorption and charge transfer processes induced by Ti incorporation and could be regulated by tuning the Mo/Ti ratio in Mo1–xTixS2. In addition, the Ti-incorporated phase heterostructures with an optimized 1T concentration showed further improved gas-sensing properties compared to the highly metallic or semiconducting nanosheets with the same chemical composition, which exhibited an obvious response of 0.035% to 1 ppm formaldehyde with an excellent limit of detection as low as 39 ppb, good repeatability, and short response and recovery times. Moreover, flexible gas sensors based on the optimized nanosheets showed well-maintained responses under moderately bent conditions. Our findings demonstrate that the creation of phase heterostructures with tunable compositions and phases may provide more opportunities to tailor their sensing properties.

研究领域: 材料科学 · 环境监测 · 传感器技术
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ACS Applied Nano Materials · 2024 · IF 5.3

Ti3C2Tx Nanosheet/Bi2S3 Nanobelt Composites for NO2 Gas Sensing

Chong Li,Ran Tao,Jianlei Zhang,Jinlong Chen,Chen Fu,Jikai Zhang,Huiling Ong,Chenze Lu,Yi Chen,Qiang Wu,Jing-Ting Luo,Yongqing Fu

Along with the revolution of the Internet of Things (IoT), smart, flexible, easily fabricated, and highly sensitive gas sensors are essential for many portable electronics. In this study, a wearable NO2 sensor based on a nanomesh structure woven with Ti3C2Tx microflakes and Bi2S3 nanobelts operated at room temperature was successfully designed and prepared. The effects of the mass ratio between two materials on the performance were evaluated. Bi2S3 nanobelts embedded inside accordion-like Ti3C2Tx provide large specific surface areas and abundant active sites for the adsorption of NO2 molecules. Attributed to the high conductivity of Ti3C2Tx, the carriers generated in the sensitive layers are easily transmitted during sensing, thus significantly reducing the response and recovery times. The sensor based on the nanomesh containing 30 wt % Ti3C2Tx exhibits excellent sensing performance, fast response/recovery rates, and high stability even in arbitrary deformed shape conditions. Upon exposure to 1 ppm NO2, the response of the sensor is 12.67, and the response/recovery times are 5/28 s, respectively. A stable sensing performance can be maintained after 1500 cycles of deformation. This work demonstrates a simple but reliable manufacturing strategy of wearable gas sensors for the next generation of IoT monitoring network-linking human activities.

研究领域: 材料科学 · 传感器技术 · 物联网应用
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Applied Materials Today · 2024 · IF 7.2

Laser fabrication of epidermal paper-based graphene sensors

Xiao Li,Dong Su,Yuyang Gu,Jia Zhang,Shu Li,Yao Xiao,Jiankang He,Wei Wang,Dichen Li

There is an increasing demand for epidermal sensors that can adapt to the contours and the movements of the human body, but the fabrication of prevalent polymer-based epidermal sensors often involves costly materials and complex procedures. Paper has emerged as a cost-effective substrate for next-generation epidermal sensors, featuring such advantages as bendability, breathability, biocompatibility, and environment-friendliness. However, transducing materials are commonly introduced to paper substrates in post hoc manners or through time-consuming syntheses, in addition to the direct manufacturing of paper. Here we report an integrative method to fabricate epidermal paper-based graphene sensors, where graphene induction and paper cutting can be achieved in a single lasing procedure to generate both transducing components and overall sensor formats. Lasing conditions are systematically explored, mainly to control the multifaceted properties of the obtained graphene transducers. The resultant paper-based graphene structures exhibit sufficient reliability in various scenarios regarding storage, lighting, and deformation. Paper-based graphene sensors are strategically designed in terms of overall formats, geometric patterns, hydrophilicity/hydrophobicity, surface functionalization, and readouts for measuring biophysical and biochemical information relevant to human health. The sensor performance can be optimized by adjusting laser power, and the calibrated sensitivities for mechanical strain, temperature, humidity, pH, and glucose are 76.93, –0.15% °C –1 , 37.06 μA % –1 , 28.13 mV pH –1 , and 1.26 μA mM –1 , respectively. Multimodal health monitoring is demonstrated with paper-based graphene sensors. Our approach can facilitate the generation of epidermal paper-based sensors and meet diverse requirements of health monitoring.

研究领域: 材料科学 · 生物医学工程
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