CHINESE JOURNAL OF ANALYTICAL CHEMISTRY
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2019
·
IF 0.931
Xue-Lei YANG,Bin ZHAO,Fei FENG,Hai-Mei ZHOU,Heng YANG,Xin-Xin LI
A semi-packed micro gas chromatography (μGC) column embedded micro-elliptical pillars was fabricated based on micro- electro-mechanical system (MEMS) technique. The mesoporous silica (MS) film with 2-nm pore size and large specific surface area was coated on the inner surface of the μGC column as stationary phase. A baseline separation of alkanes (C5–C10) was realized by the μGC column which used MS as stationary phase, and the resolution of pentane and solvent (impurity) was as large as 3.6. Compared with the μGC column which used polydimethylsiloxane (PDMS) as stationary phase under the same injection volume, the number of theoretical plates of octane had a 46% increase and reached up to 14458 plates. Meanwhile, the peak area of nonane was increased by 349.8%.
研究领域:
分析化学
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材料科学
·
微纳制造
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高影响因子
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
·
2024
·
IF 5.6
Chenyang Yu,Jianhong Liu,Hongchao Zhao,Mengqing Wang,Jing Li,Xiaopeng She,Yi Chen,Yangjie Wang,Bochao Liu,Cheng Zou,Yong He,Yong Zhou
Acetone plays a critical role in environmental protection and human healthcare, thus necessitating sensitive and selective detection. In this regard, a resistive microelectromechanical system (MEMS) acetone sensor featuring a sensing layer of
$\alpha $
-Fe2O3 nanoparticles modified tungsten trioxide (WO3) nanoplates is utilized in this work. After optimizing the composition proportion and operating temperature, the Fe/W:0.2 sensor delivered a wide detection range (0.05–80 ppm), and an approximately sevenfold higher response of 40.6 toward 10 ppm acetone at
$217~^{\circ }$
C than pure WO3 analog. In addition, a limit of detection (LoD) of 50 ppb was achieved, which ranks among the lowest cases thus far. Together with excellent repeatability, selectivity, and long-term stability, the sensor also showed a humidity-enhanced response. This work offers an alternative strategy to realize trace acetone detection within high-humidity conditions and showcases a huge application potential in exhaled breath-involving diabetes monitoring in the future.
研究领域:
材料科学
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医学
·
环境科学
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高影响因子
Micromachines
·
2018
·Vol. 9
·期 4
·165
·
IF 2.222
Zong Liu,Siyin Qin,Xingwei Chen,Dazhu Chen,Fei Wang
This paper reports on a chip cooling solution using polydimethylsiloxane (PDMS) based microfluidic devices filled withn-Octadecane. A thick SU-8 layer of 150 µm is used as the master mold for patterning PDMS fabrication. With the SU-8 mold, patterns with straight lines at microscale have been fabricated with standard micro-electro-mechanical system (MEMS) technology. Thermal polymer bonding technique is used to bond the PDMS pattern directly to a flat polydimethylsiloxane (PDMS) film which results in the sealed microchannels.n-Octadecane as a phase-change material has been successfully filled in the microchannels using a dispensing machine. Infrared thermal image shows a sharp contrast of the temperature distribution between the chip withn-Octadecane and the empty chip during the same heating process. This result indicates an efficient cooling performance of the microchannel device with phase-change material. A thermal stimulation test demonstrates that a 16 °C-lower temperature difference can be achieved. This microchannel device, benefited from the flexibility of PDMS substrate, shows specific advantages in meeting the need for the heat dissipation of flexible electronics such as flexible displays, electronic skins, and wearable electronics. Latent heat of the phase-change material can keep the temperature of devices relatively lower over a period of time, which shows potential application values on discontinuously active flexible electronic devices.Keywords:MEMS;polymer;micro-channel device;phase-change material;chip cooling;thermal management;flexible electronics
研究领域:
微纳米技术
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材料科学
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热能工程
·
电子工程
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DOI
PubMed
高影响因子
ACS Sensors
·
2026
·
IF 10.9
Xiong Haichao,Xu Shusheng,Wang Tao,Ni Wangze,Wang Zhaozhao,Chen Yiting,Shi Xuerong,Zhao Lipeng,Li Ming
High-performance hydrogen (H 2 ) sensors are essential for industrial safety and environmental monitoring. Herein, we report a microelectromechanical system (MEMS) H 2 sensor based on SnO 2 nanoflowers in situ decorated with PdRh nanoparticles (PdRh/SnO 2 ). Gas-sensing evaluations demonstrate that the sensor exhibits an ultrahigh response ( R a / R g ) of 20.2 to 100 ppm H 2 , representing a nearly 4-fold enhancement compared to the conventional Pd/SnO 2 sensor. Furthermore, it displays rapid response and recovery times of merely 1.7 and 2.2 s, equivalent to ∼63 and ∼34% of those exhibited by the Pd/SnO 2 counterpart, respectively. Additionally, the device achieves a notably low detection limit below 100 ppb alongside good long-term stability. Mechanistic studies combining experiments and density functional theory (DFT) calculations reveal that this significant performance enhancement originates from a dual mechanism. While the synergistic catalytic dissociation of H 2 by the PdRh nanoalloy contributes to the improved sensing kinetics, we uncover a more critical role of Rh: it lowers the desorption energy barrier of lattice oxygen in SnO 2 , thereby inducing the formation of high-density oxygen vacancies at the heterointerface. This Rh-mediated defect engineering promotes the adsorption and generation of reactive oxygen species, providing abundant active sites for H 2 reactions and substantially amplifying the sensing response. Finally, the PdRh/SnO 2 -based MEMS sensor was successfully integrated into a portable wireless monitoring system, validating its tremendous potential for H 2 detection applications.
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ACS Applied Nano Materials
·
2026
·Vol. 9
·期 30
·14188-14198
·
IF 5.8
Qiu Changkun,Zhu Liang,Li Qingrun,Wang Haozhi,An Fei,Wang Shiqiang,Fan Chao,Yang Zhe
Hydrogen
sulfide (H 2 S), a highly toxic and corrosive
gas, requires highly sensitive, selective, rapid, and stable trace-level
detection in various industrial settings. To address the limitations
of conventional metal oxide-based H 2 S sensors─such
as insufficient detection limits, poor selectivity, and inadequate
long-term stability─this study developed an H 2 S
sensor by integrating Pd-loaded In 2 O 3 nanomaterials
with microelectro-mechanical systems (MEMS) technology. A Pd–In 2 O 3 composite with a one-dimensional nanorod structure
was successfully synthesized via a hydrothermal method followed by
thermal treatment. Systematic characterization confirmed that Pd nanoparticles
are uniformly dispersed on the In 2 O 3 surface
in the metallic state. When fabricated into a MEMS-based sensor, the
composite exhibited excellent overall performance at near-ambient
temperature (25 ± 2 ° C): a detection limit as low as 50
ppb, response and recovery times of 8 and 13 s, respectively, a selectivity
ratio ≥5 (response to H 2 S compared to interfering
gases such as CO, H 2 , and CH 4 ), and less than
3% fluctuation in repeated tests. Theoretical calculations revealed
that the adsorption energy of H 2 S on Pd–In 2 O 3 (−0.787 eV) is more negative than that on pristine
In 2 O 3 (−0.679 eV), accompanied by a greater
charge transfer (0.124 |e| vs 0.086 |e| for pristine In 2 O 3 ). Mechanistic analysis indicated that Pd doping not
only modulates the band structure of In 2 O 3 via
an electronic doping effect (forming a Schottky junction) but also
acts as catalytic active sites, preferentially promoting the surface
oxidation of H 2 S. The synergistic effect of enhanced adsorption
affinity, accelerated charge transfer (verified by theoretical calculations),
and selective catalysis significantly improves the sensor’s
sensitivity, selectivity, and response speed. This work provides an
effective strategy for material design and device implementation in
developing high-performance, low-power, and easily integrable trace
H 2 S sensors.
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CERAMICS INTERNATIONAL
·
2025
·
IF 5.6
Zhi-Wei Zheng,Shi-Ying He,Zhan-Yuan Huang,Yi-Wei Wang,Xiao-Fei Zhang,Lang-Xi Ou,David Wei Zhang,Hong-Xiu Yu,Hong-Liang Lu
The TiO 2 /SnO 2 core-shell nanowires (NWs) with precisely controlled SnO 2 shell thickness were successfully synthesized via facile hydrothermal method and atomic layer deposition (ALD) process. The innovative approach of integrating ALD with hydrothermal synthesis allowed for the precise tuning of the SnO 2 shell thickness, which is critical for optimizing gas sensing performance. The sensing performance of the prepared sensor was found to be highly dependent on the SnO 2 shell thickness. Notably, the sensor with a 20 nm SnO 2 shell exhibited the highest response (R a /R g ) of 5.9 towards 5 ppm H 2 S at 300 °C, which was approximately three times higher than that of the pristine TiO 2 NWs sensor (∼1.8). This significant enhancement in H 2 S sensing performance can be attributed to the formation of the TiO 2 /SnO 2 heterojunction and the optimal SnO 2 shell thickness, which were further elucidated through chemisorbed oxygen model, heterojunction depletion theory, and bandgap alignment. Additionally, the sensor demonstrated low power consumption (∼100 mW), great selectivity towards H 2 S, fast response/recovery times (25 s and 173 s, respectively), the ability to detect H 2 S at low concentrations (200 ppb), high sensitivity, excellent repeatability and remarkable stability (over 10 months). Therefore, the proposed MEMS-based TiO 2 /SnO 2 core-shell NWs gas sensor provides a promising approach for industrial and environmental monitoring applications.
研究领域:
材料科学
·
传感器技术
·
环境监测
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高影响因子
CHEMICAL ENGINEERING JOURNAL
·
2023
·
IF 15.1
Yuxiang Li,Xi Chen,Lei Zhang,Ruishan Han,Iftikhar Hussain,Xiaoxia Ma,Kaili Zhang
Metastable intermolecular composites (MICs) composed by solid fuel and oxidizer can undergo violent redox reaction with release of huge amount of energy. Integration of MIC with microelectromechanical-system (MEMS) is of particular interest to meet the demand of miniaturization in modern pyrotechnic devices. Meanwhile, fluorine-containing oxidizers are favored in MIC owing to their potential to fluorinate the oxide passivation layer in common elemental fuels. Herein, Co(OH)F was employed for the first time as a novel fluorine-containing oxidizer in Al-based MIC. Vertically aligned Co(OH)F@Al nanobelt arrays (NAs) with tunable morphology were successfully fabricated on a variety of substrates (Si, glass, Ni, Cu, Ti) via a facile hydrothermal synthesis followed by electron beam evaporation. The whole fabrication process is highly compatible with modern MEMS technology. The thermal behavior of pure Co(OH)F and Co(OH)F@Al composites was comprehensively investigated by TG-DSC and a series of ex-situ and in-situ characterization. It was found that, Co(OH)F@Al composites achieved main exothermal reaction before melting of Al regardless of morphology and equivalence ratio. This feature is attributed to the etching of Al 2 O 3 shell by HF released from Co(OH)F which is termed as pre-ignition reaction. To elucidate the effect of micro-structure on the actual specific heat release, we proposed a phenomenological model which can be a reference for future micro-structure design of MIC.
研究领域:
材料科学
·
化学工程
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高影响因子
ADVANCED FUNCTIONAL MATERIALS
·
2024
·
IF 18.5
Yu Bing,Zhao Song,Hongtao Jiang,Xiaoyi Xu,Zhongzheng Yu,Tingting Zhou,Tong Zhang
Water competitive adsorption and limited reaction sites on the micro-scale sensing area of micro-electro-mechanical system (MEMS) sensors are two bottleneck problems that restrict the detection of trace indoor polluted gases, leading to drifting and weak signals. To address this, a “duet-insurance” sensing strategy is proposed to protect and amplify the sensing signal. For the first-level protection, the well-designed double-layer structure consisting of Janus TpMa covalent organic framework (COF)/Eu-doped α-Fe 2 O 3 can resist diffusion of water molecules and facilitate the electron transfer from formaldehyde (CH 2 O) to sensing layers, benefiting from the outer hydrophobic character of Janus TpMa and the strong CH 2 O adsorption capacity of Eu-doped Fe 2 O 3 . For the second-level amplification, the unique variable temperature excitation facilitates the deep penetration of CH 2 O into the active sites across COF layers, enabling signal amplification through thermally actuated carrier modulation. The sensor demonstrates high sensing ability to the CH 2 O, with an ultra-low limit of detection of 794 ppt. Leveraging the novel sensing strategy, a multi-functional, visual sensing system is designed to identify multi-indoor pollution gases by feature signal encoding and color mapping, showcasing the promising potential for MEMS sensors based on Janus TpMa COF/Eu-doped α-Fe 2 O 3 materials.
研究领域:
材料科学
·
环境科学
·
化学
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高影响因子
Results in Engineering
·
2025
·
IF 7.9
Hao Sun,Guoxin Jiang,Shenghui Guo,Ming Hou,Li Yang,Xiaolei Ye,Yi Xia,Qiuni Zhao
Gas sensors based on MEMS are facing challenges such as the limited variety of micro-hot (MHP) plate structures and the low heating efficiency of MHP. This work employed COMSOL's multiphysics coupling capabilities combined with experimental validation to design and simulate a MHP structure characterized by high heat transfer efficiency, low stress, and structural stability. Based on the diverse thermal and mechanical simulation outcomes, an in-depth investigation into the influence mechanisms of MHP structural morphology, geometry, electrode patterns, and other conditions on the temperature field and thermal stress concentration within MEMS devices was conducted. This work designed and obtained the optimal device structure. At the same time, verification is conducted through experimental methods. Based on simulation results, two MHP devices were developed and manufactured using zinc oxide as the gas-sensitive material to validate their performance. Using MEMS micro-electro-mechanical systems, hydrogen gas at 500 ppm was detected at different temperatures, while their thermal and mechanical properties were simultaneously investigated. The MHP structure designed in this paper achieves the optimal operating temperature of 265°C at an extremely small voltage (0.2V), while the overall structure maintains a small deformation (<2μm). The response values of the two devices to hydrogen gas reached 6.55 and 5.47, respectively, far exceeding those of conventional planar devices. This work shows a new design method of mems chip, which can measure the concentration of hydrogen more accurately and has accurate gas sensitivity measurement ability. It plays an important role in the field of hydrogen energy safety.
研究领域:
微电子机械系统（MEMS）
·
气体传感技术
·
材料科学
·
热工学
·
器件物理
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高影响因子
ACS Sensors
·
2026
·
IF 10.9
Zechun Li,Ming Li,Ying Chen,Shaokui Tan,Zhihao Zhang,Pengcheng Xu,Xinxin Li
Achieving high-sensitivity H2 detection in complex enclosed environments such as oxygen-free conditions is crucial for the safe application of hydrogen energy. This work proposes a high-sensitivity MEMS (micro electromechanical system) calorimetric H2 sensor operable in oxygen-free environments, which relies on a thermopile chip that converts the heat released from the reaction between hydrogen and Pd-based nanocatalysts into measurable voltage signals. It is found that the support has a significant influence on the reaction activity of Pd-based nanocatalysts. Compared with the carbon support like nanodiamond, the metal oxide support can not only accelerate the sensor’s response speed but also significantly increase the response magnitude, which can be attributed to the presence of the hydrogen spillover effect. The optimized H2 sensor exhibits a response amplitude twice that of pure Pd nanoparticles and a response time reduced to one-third of the latter. The optimized H2 sensor also achieves a ppb-level detection limit and demonstrates good repeatability, long-term stability, and superior selectivity, providing a new approach for the design and fabrication of high-performance MEMS H2 sensors.
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PubMed
高影响因子
SENSORS AND ACTUATORS B-CHEMICAL
·
2025
·
IF 7.7
Renjun Si,Hongze Jiang,Jinbo Yang,Renminxi Ou,Shaofeng Chen,Xin Guo,Shunping Zhang
Aiming to address the bottleneck issues of database complexity and signal drift in electronic nose systems, this study proposes a novel supplementary strategy for multi-component gas detection. The MEMS gas sensor developed here, based on temperature-programmed desorption (TPD), enables the extraction of multiple volatile target compounds in Baijiu (Chinese distilled spirits) through an adsorption process. Subsequently, the TPD spectrum is employed to derive characteristic signals of these target substances for identification. By incorporating this sensor into a Baijiu detection system and combining it with pattern recognition algorithms, accurate classification of aroma profiles has been successfully achieved for both known and unknown Baijiu samples across different brands. This multi-component gas detection method not only offers an effective complement to electronic nose technology but also provides valuable insights for improving the selectivity of metal oxide semiconductor (MOS) gas sensors.
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ADVANCED FUNCTIONAL MATERIALS
·
2025
·
IF 19
Xue Liu,Jian Wu,Jingzhu Li,Qijie Wang,Yuyang Wang,Nantao Hu,Jianhua Yang,Min Zeng,Zhi Yang
The electric vehicle industry faces safety challenges from battery thermal runaway, necessitating real-time monitoring of multi-parameter signals like gas concentration and temperature in oxygen-free environments. This study introduces dual-parameter micro-electro-mechanical system (MEMS) sensors based on 1D conductive metal-organic frameworks (MOFs) – MBTA (M = Cu or Ni). Synthesized via room-temperature wet chemical coordination polymerization using 1,2,4,5-benzenetetramine ligands and transition metals, these chain-structured MOFs exhibit dual sensitivity to carbon monoxide (CO) and temperature. The MBTA films are grown in situ on 4-channel MEMS devices through vapor diffusion, creating gas-temperature sensors. Under anhydrous, oxygen-free conditions, the sensors achieve low CO detection limits with high selectivity and stability, while demonstrating linear temperature responses across 20–120 °C. Polydimethylsiloxane encapsulation isolates the CO-sensing channels from temperature-detection channels, enabling decoupled parameter measurements. Integrated with data processing and wireless transmission modules, the system supports remote environmental monitoring. This work advances multimodal sensing mechanisms with temperature compensation and lays the groundwork for wireless real-time monitoring systems, significantly enhancing thermal runaway early-warning capabilities in lithium-ion batteries. The design strategy provides insights for developing multifunctional sensing materials and safety management technologies in energy storage applications.
研究领域:
材料科学
·
传感器技术
·
能源安全
·
电化学
·
纳米材料
·
智能监测系统
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高影响因子
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