IEEE SENSORS JOURNAL
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2025
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IF 4.5
Mengxue Xu,Yihong Zhong,Xiaochun Hu,Yi Tao,Qingqing Shen,Shumin Zhang,Pingping Zhang,Hongpeng Zhang,Zhenxing Cheng,Xuhui Sun
Given the severe threats of chemical warfare agents (CWAs) to public safety, gas sensing technology development is vital. Metal oxide semiconductor (MOS) based gas sensors are popular for detection of CWA simulants, which have been widely used in the safe study of CWAs detection due to their similar structure and properties with actual CWAs. But the reported MOS sensors still suffer from high power consumption and poor selectivity of discriminating multiple simulants. In this work, an electronic nose (e-nose) driven by artificial intelligence (AI) algorithms is established to detect and identify five CWA simulants. The e-nose consists of 24 MOS based micro-electro-mechanical system (MEMS) gas sensors that own advantages of small size (0.9 mm×0.9 mm), low-power (<10 mW in average), and exhibits good sensing performances of relatively high response, low detection limit, wide concentration detection range, considerable reversibility and stability towards CWA simulants. Methods are proposed to extract three types of features from sensing performances (the steady-state response, maximum response and response time), initial response rate coefficient, and global change trend in the response stage, respectively. Subsequently, linear discriminant analysis (LDA) was utilized and back propagation network (BPN) was optimized to identify the simulants, obtaining preliminary separated classes in 3D LDA space and high prediction accuracy (>99.0%) with BPN, respectively. These results suggest that the AI driven e-nose strategy has highly potential to be applied as a portable equipment for rapid, on-site detection and identification of CWA simulants and even actual CWAs.
研究领域:
化学战剂检测
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气体传感器技术
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微机电系统（MEMS）
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人工智能在传感系统中的应用
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环境监测
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产品关联
DOI
高影响因子
CHINESE JOURNAL OF ANALYTICAL CHEMISTRY
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2018
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IF 0.824
Bo-Wen TIAN,Fei FENG,Bin ZHAO,Fan LUO,Xue-Lei YANG,Hai-Mei ZHOU,Xin-Xin LI
A monolithic micro gas chromatography (μGC) chip which integrated the micro separation column (μSC) and the micro thermal conductivity detector (μTCD) based on MEMS (Micro-electro-mechanical systems) technique was fabricated. Compared to the state of the art, the μSC with high depth-to-width ratio channels that was coated with mesoporous silica nanoparticles as stationary phase could effectively improve the column capacity and separation performance. Besides, the stable suspending μTCD, which was designed and fabricated in two ports of the μGC chip, could availably enhance the thermal isolation and reliability of the device. The mixture of light hydrocarbons (methane, ethane, propane and butane) could be separated from each other and detected by this monolithic integrated μGC chip, in which the overall analysis and detection time was only 33 seconds, the separation resolution of ethane and propane was 8.34, and the number of theoretical plate was as high as 11420. The monolithic integrated μGC chip has many advantages such as good separation resolution, high column efficiency and short analysis time, and is suitable for portable gas chromatographic field and onsite detection.
研究领域:
分析化学
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微机电系统
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产品关联
DOI
高影响因子
CHEMICAL ENGINEERING JOURNAL
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2026
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IF 12.5
Zhiyuan Jiang,Fan Zhao,Chong Li,Ruihao Wang,Xiaoqi Feng,Mengke Li,Zongqi Wang,Siyi Liu,Kaixuan Yao,Lingmin Yu,Hairong Wang
In-situ growth of NiO nanowalls on MEMS micro-hotplates secures Ohmic contact. • Pt doped into the NiO lattice intrinsically anchors oxygen vacancies. • The device achieves exceptional 60-day stability and 98% RH moisture resistance. • Rapid and ultraselective acetone sensing enables non-invasive diabetes screening. Non-invasive breath acetone analysis offers a promising approach for continuous diabetes monitoring. However, poor long-term stability and material-electrode interfacial drift in p-type metal oxide sensors remain key bottlenecks for their clinical translation. To address these challenges, a Micro-Electro-Mechanical-System (MEMS) acetone sensor was developed via the in-situ growth of Pt-doped NiO nanowalls on a micro-heater chip. Unlike conventional surface modification and physical coating methods, the intrinsic doping of Pt within the NiO lattice and its integration with the substrate address signal drift through a synergistic dual mechanism. Specifically, the in-situ growth minimizes contact resistance drift at the material-electrode interface. Simultaneously, intrinsic Pt lattice doping anchors the active sites, suppressing catalyst thermal agglomeration and preserving structural stability at the gas-solid interface. The optimized sensor exhibits a response of 10.3 to 100 ppm acetone at 200 °C (a 5.7-fold enhancement over pure NiO) and a response time of 37 s. Furthermore, the device demonstrates continuous stability over 60 days and steady-state reliability at the 1.8 ppm clinical diagnostic threshold. It also shows stable moisture resistance (up to 98% relative humidity), maintaining typical p-type characteristics without response reversal phenomena. Supported by competitive co-adsorption density functional theory (DFT) calculations, this moisture tolerance is attributed to a favorable adsorption energy that prioritizes acetone chemisorption over water molecules. Comprehensive characterizations and DFT models indicate that Pt doping triggers localized lattice distortions and charge compensation, increasing the surface oxygen vacancy concentration (35.2%). This theoretically broadens the hole accumulation layer (HAL) and facilitates single-molecule acetone adsorption (−1.12 eV), stabilizing the p-type conduction mechanism. This work provides a stable, drift-resistant acetone sensor capable of sub-ppm trace detection for non-invasive diabetes screening. Download: Download high-res image (204KB) Download: Download full-size image
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DOI
高影响因子
SENSORS AND ACTUATORS B-CHEMICAL
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2026
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IF 8.3
Wei Wei,Jinxiao Liu,Xinying Lu,Xiaohong Xia,Yuwen Bao,Cong Ye,Xiaolin Wu,Yun Gao
The development of highly sensitive hydrogen sensors with low operating temperatures is crucial for the safe utilization of hydrogen. Practical operating environments demand not only high sensitivity but also immunity to both humidity fluctuations and interference from other reducing gases, especially CO. In this work, hierarchical architectures comprising WO 3 nanosheets (NS) assembled on WO 3 microspheres (M) is deliberately designed and successfully synthesized via a two-step solvothermal method. Subsequently, Pt is functionally loaded onto the surfaces, adopting various morphologies and serving multiple functions for H 2 sensing. Notably, the optimal operating temperature is reduced to 50 °C while achieving exceptional sensing characteristics: an ultrahigh response of 8372.2 toward 1200 H 2 , a swift 2 s response time, outstanding selectivity with immunity to CO interference, excellent humidity immunity, and robust long-term stability. The mechanism underlying the superior sensing capability is systematically investigated to elucidate the performance enhancement. This work presents a pioneering approach to constructing high-performance, anti-interference gas sensors through hierarchical architecture engineering, offering new insights into the design and application of advanced sensing materials.
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DOI
高影响因子
ACS Applied Nano Materials
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2024
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IF 5.3
Yapeng Yao,Xiaodong Gou,Wei Liu,Zihang Liang,Jiangbo Zhang,Zhongliang Ma
Integrating energetic materials into microelectromechanical system (MEMS) to enhance their energy output characteristics has shown extensive potential across aerospace, defense, and civilian applications. Within this study, the MEMS compatible Cu/DNBT (DNBT = [5,5′-dinitro-3,3′-bi(1,2,4-triazole)]) and Cu/DNBT@nano-Al energetic films were successfully synthesized on the copper substrate using an electrochemical method and a drip coating method. The scanning electron microscope (SEM), X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), differential thermal analyses (DTA), and a pulse laser ignition test were used to analyze the morphology, composition, thermal performance, and ignition properties of the prepared samples. The findings indicate that the prepared Cu/DNBT and Cu/DNBT@nano-Al energetic films exhibit a nanostructure, and their morphology can be effectively regulated via modifications to the deposition voltage, deposition time, and aluminum plating frequency. Furthermore, the energetic properties of Cu/DNBT@nano-Al films can be adjusted after the deposition of nano-Al. Their heat release, flame height and ignition duration can reach up to 1823.1 J·g–1, 13.5 mm, and 400 μs, respectively. These findings suggest that Cu/DNBT@nano-Al energetic films being a prime contender for initiating powders in MEMS pyrotechnics. In summary, this work offers valuable insights into the integration and application of energetic materials in MEMS ignition devices.
研究领域:
材料科学
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化学工程
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机械工程
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航空航天工程
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国防技术
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DOI
高影响因子
ACS Sensors
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2026
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IF 10.9
Ruilong Ma,Youlin Gu,Zhenyu Liu,Zhencheng Liu,Wenhao Wu,Fanhao Meng,Xiaoyan Peng
Hydrogen sulfide (H2S) poses significant risks in industrial settings due to its high toxicity and flammability, making its efficient detection crucial for operational safety. In this study, high-performance MEMS gas sensors based on a nitrogen-doped carbon quantum dot/nickel cobaltite (N-CQD/NiCo2O4) nanocomposite were developed, achieving highly sensitive H2S detection. Characterization techniques such as XRD, XPS, SEM, and TEM confirmed the successful loading of N-CQDs onto the NiCo2O4 surface, leading to an increase in oxygen vacancy concentration. The sensor with NCQD/NCO-2 exhibited excellent H2S selectivity, good repeatability, and long-term stability over 40 days. At low-temperature heating, the response to 1000 ppm H2S was enhanced by a factor of 6.84, with a theoretical detection limit of 9.42 ppb. Beyond the material-level enhancement, this work integrates N-CQD-mediated surface/interfacial activation, a low-temperature-heated MEMS sensor array, and a lightweight temporal regression model for H2S quantification. The DCG-Net model achieved accurate concentration prediction with an R2 value of 0.9902 and was successfully deployed, offering a compact material-device-algorithm solution for intelligent H2S monitoring.
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DOI
高影响因子
ACS Sensors
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2025
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IF 9.1
Renjun Si,Renminxi Ou,Jinbo Yang,Shaofeng Chen,Hongze Jiang,Xin Guo,Shunping Zhang
Drunk driving is a major threat to global traffic safety, accounting for 50% to 60% of traffic accidents. To address the bottleneck problem of insufficient selectivity of metal oxide gas sensors in drunk driving detection, this paper proposes an optimization strategy based on the principle of selective extraction and programmed temperature desorption technology. This strategy uses temperature modulation to control the adsorption processes of target gases, solving the cross-interference problem between ethanol and other volatile organic compounds in exhaled breath. A temperature-modulated on-chip programmed temperature desorption ethanol sensor was developed using ZSM-5 and Pt@SnO2 as the adsorption and desorption material and gas-sensitive material for ethanol, respectively. By optimizing the temperature modulation parameters (heating and cooling rates, adsorption time), the height of the ethanol desorption peak was precisely quantified. The maximum deviation of the desorption peak height of interfering gases and their mixtures with ethanol (40 ppm) in human exhaled breath from the detection instrument was only equivalent to 5.20 ppm ethanol. The highly selective ethanol sensor was integrated into the USB detection terminal to form a portable U-disk drunk driving detector, which has significantly better sensitivity and anti-interference ability than senior commercial products. The high selectivity is essentially due to the rapid extraction of ethanol from the environment by ZSM-5 in a short time.
研究领域:
传感器与生物传感器
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微机电系统
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气体检测技术
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分析化学
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交通安全
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纳米材料
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产品关联
DOI
PubMed
高影响因子
IEEE SENSORS JOURNAL
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2026
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IF 4.5
Weiwei Qin,Xuefeng Hu,Ming Zhou,Jilei Yang,Jiaming Liu,Peipei Li,Xiaoliang Wang,Liping Tan,Yali Bi,Wenjuan Yu,Wei Zhang
The detection of hydrogen-methane (H2-CH4) in exhaled breath takes on paramount importance for small intestinal bacterial overgrowth (SIBO) diagnosis. However, the concentrations of H2 and CH4 associated with SIBO are significantly lower, reaching only 20 and 12 ppm, respectively. Furthermore, the detection of these gases can be compromised by the presence of various volatile organic compounds (VOCs) and relative humidity (RH) in exhaled breath. In this study, a low-powered system with three high-performance tin dioxide (SnO2)-based micro-electro-mechanical system (MEMS) gas sensors for H2-CH4-VOCs detection was modified by magnetron sputtering deposition and coating, which are named as Pd/SnO2-M (M means magnetron), Pd/SnO2-C (C means coating), and SnO2-D (D means multiple doping), respectively. Particularly, the Pd/SnO2-M sensor shows excellent selectivity, high sensitivity, and low detection limitation (down to 0.033 ppm) toward H2, which is attributed to the compact grains of the film and the Pd catalysis for the dissociation of H2 molecule into two active hydrogen atoms better than other gases. In addition, the Pd/SnO2-C sensor exhibits high sensitivity and low detection limitation toward H2 (down to 0.186 ppm) and CH4 (down to 1.1 ppm) since doped Pd also gives rise to adsorbed oxygen species (Oads) above the SnO2 surface besides its catalysis. Moreover, the assembled MEMS sensor array system demonstrates gas recognition capability based on linear discriminant analysis (LDA) under controlled single-gas conditions in high-humidity environments. Then, the as-modified MEMS sensor array system is a promising platform for H2-CH4 detection.
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DOI
PubMed
高影响因子
ACS Applied Materials & Interfaces
·
2020
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IF 8.758
Xiaoxia Ma,Ke Cao,Xiaona Huang,Shaoran Yang,Yinghua Ye,Ruiqi Shen,Guangcheng Yang,Kaili Zhang
Integrating energetic materials with a microelectromechanical system (MEMS) to achieve miniaturized integrated smart energetic microchips is promising. The potential applications include actuation in lab-on-a-chip devices, ignition in automobile airbags, propulsion and attitude control of micro-/nano-satellites, and miniaturized electro-explosive devices. In this work, a new type of MEMS-compatible energetic arrays was in situ realized on a copper substrate, which comprised a new energetic coordination polymer (ECP; Cu1.5C2N8O2·H2O) with tunable nanostructures and a nano-aluminum (nano-Al) covering layer. The composition, morphology, and energetic characteristics of the energetic arrays can be easily tuned by adjusting the reaction time. The maximum heat release of 1850.2 J/g in thermal analysis and the intense flame in open burning experiment proved its excellent exothermic and combustion performance. A closed-bomb experiment further revealed that the ECP@nano-Al energetic arrays supported on Cu(OH)2 nanorods had a peak pressure (5.5 MPa) and a pressure duration (0.5 s) more than twice those of nanoscale Al/CuO powder because of the introduction of gas elements (e.g., C, H, and N). A preliminary impulse experiment was also conducted through the torsion pendulum method. The displacement of the torsion pendulum in the micrometer scale proved the potential application of the energetic arrays in micropropulsion systems. Overall, this work can serve as a reference for the synthesis and applications of ECPs.
研究领域:
材料科学
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能源工程
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产品关联
DOI
PubMed
高影响因子
ACS Applied Materials & Interfaces
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2026
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IF 7.8
Yong Yan,Xigui Lan,Yuzhou Li,Zhihao Xiong,Meihua Liang,Jiaxuan Yang,Xiaodong Liu,Rongrong Jia,Yuanyuan Ge,Lian Duan,Mitsuo Shoji,Yasuteru Shigeta,Zhili Li,Lei Huang
With the rapid development of the hydrogen energy economy, there is an increasingly urgent demand for low-power-consumption and integrable sensors capable of accurate and real-time monitoring of hydrogen (H2). In this study, SnO2 nanoparticles rich in oxygen vacancies were successfully prepared via a metal–organic framework (MOF)-derived method. Based on this, highly dispersed Pt-modified SnO2 nanoparticles were fabricated using a two-step annealing method, and a MEMS H2 sensor with high response and low power consumption was developed. Studies have shown that the 0.5%Pt-SnMOF/600-SnO2 sensor exhibits a high response of 31.5 to 100 ppm of H2 at an operating temperature of 201 °C, which is 2.7 times that of the SnMOF/600-SnO2 sensor (with an optimal operating temperature of 244 °C), and its power consumption is only 22.1 mW. Furthermore, this sensor demonstrates excellent comprehensive performance, including an extremely low limit of detection of 73.6 ppb, outstanding selectivity, and good long-term stability. Mechanistic studies indicate that the enhancement of gas-sensing performance is due to a combination of factors: plentiful oxygen vacancies, the role of Pt in promoting oxygen reactions, and its effect on the material’s electronic properties.
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DOI
PubMed
高影响因子
SENSORS AND ACTUATORS B-CHEMICAL
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2024
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IF 8
Zengyi Tang,Yamin Liu,Mianyi Xiang,Daxiang Cui,Qichao Li
The detection of volatile organic compounds (VOCs) has numerous applications in environmental monitoring and biomedicine. Metal oxide semiconductor (MOS) gas sensors are widely used in gas detection due to their simple structure, low fabrication cost, and fast response speed. However, MOS gas sensors have broad-spectrum responsiveness to VOCs, making selectivity a challenge. The most commonly used method to obtain selectivity is the E-nose system consisting of multiple sensors. However, the size of E-noses has increased due to the number of sensors with high power consumption and complicated signal processing. In recent years, deep learning has flourished, allowing for accurate discrimination of VOCs and concentration prediction using E-nose consisting of a single sensor. This method significantly reduces power consumption and facilitates portable applications. In this work, we synthesize SnO 2 -ZnO composite oxide and fabricate a E-nose consisting of a single MEMS gas sensor. The response performance of the E-nose to VOCs is stable with a high output signal-noise ratio (SNR). We design a lightweight deep learning model based on SqueezeNet and train it using transfer learning. Linear regression is used to predict the concentration of VOCs. Our work achieves accurate identification and low-error concentration prediction of VOCs, which is valuable for subsequent portable VOC detection systems.
研究领域:
环境科学
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生物医学工程
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DOI
高影响因子
FOOD CHEMISTRY
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2025
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IF 9.8
Xingyu Wang,Pingping Liu,Haijie Ca,Cheng Zhao,Weihao Wu,Haixia Zhou,Yayao Song,Zhaohuan Zhang,Yong Zhao,Yongheng Zhu
Listeria monocytogenes ( LM ) , a foodborne pathogen renowned for its cold tolerance, often poses a contamination threat to dairy products, underscoring the urgent need for rapid detection methods to prevent outbreaks. Herein, urchin-like WO 3 nanostructures modified with Ag nanoparticles are employed to construct a highly active surface, which exhibits excellent sensing performance for 3-hydroxy-2-butanone (3H2B), a characteristic biomarker of LM . The 1.0 wt% Ag-WO 3 -based sensor characterized by high sensitivity (R a /R g = 92.7@30 ppm 3H2B), satisfactory repeatability, and potential for practical applications. Furthermore, confirmed that the chemical sensitization effect of Ag nanoparticles significantly reduces reaction activation energy. The developed gas sensor achieves highly accurate detection of LM at trace concentrations in dairy products. These insights could pave the way for the development of more efficient food safety diagnostics, ultimately contributing to enhanced public health protection.
研究领域:
食品安全
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生物传感器
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纳米材料
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微机电系统（MEMS）
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分析化学
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产品关联
DOI
PubMed
高影响因子
危险品化学品经营许可证（带存储）