2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications
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Tetramethylcyclotetrasiloxane | 1,3,5,7-Tetramethylcyclotetrasiloxane | 2,4,6,8-Tetramethylcyclotetrasiloxane | 1,2,5,7-Tetramethylcyclotetrasiloxane | Cyclotetrasiloxane, 2,4,6,8-tetramethyl- | 2,4,6,8-Tetramethyl-1,3,5,7,2,4,6,8-tetraoxatetrasilocane # | TMCTS | 2,4,6,8-Tetramethylcyclotetrasiloxane, packaged for use in deposition syste 展开