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A Novel Bi2O3-TeO2-B2O3-CuO Glass for Copper Metallization of Si3N4: Wettability, Thermal Stability, and Bonding Performance

Journal 2026 · IF 2.8 · 9(4): 37 · 发表于 2026 年 3 月 26 日
作者: Chaochen Chen,Fang Lei,Shiqing Dang,Hongyang Zhang,Ying Shi,Haohong Chen
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摘要

To address the lack of suitable glass systems for silicon nitride (Si3N4) surface metallization, which requires high wettability and thermal stability, and robust bonding between the copper layer and the ceramic substrate, a novel Bi2O3-TeO2-B2O3-CuO glass system was developed. This study systematically investigated the influence of Bi2O3concentration, glass properties, optimized paste composition, and brazing mechanism using phase analysis, microstructural characterization, particle size statistics, thermal analysis, and tensile testing. An optimal glass composition containing 20 mol% Bi2O3was identified, exhibiting high thermal stability (ΔT = 224 °C) and a coefficient of thermal expansion of 9.63 × 10−6°C−1. At a brazing temperature of 750 °C, the glass demonstrated excellent wettability with a contact angle of 27°. A conductive paste comprising 94 wt% Cu and 6 wt% glass yielded a thick film with a minimum resistivity of 6.25 μΩ·cm and a maximum tensile strength of 25.2 MPa. Mechanism analysis revealed that the superior wettability drives the liquid glass phase to form a thin intermediate layer that significantly reinforces adhesion. These findings contribute to the research and development of subsequent novel glass systems with superior performance.